International Business Machines Corporation

Tsuyoshi Iguchi

Mitsuru Uda

Tetsuya Nogami

The invention provides methods and apparatus for substrate inspection and other lighting applications. It includes an lighting apparatus which comprises: an illuminator including a light source for emitting lights ; supporting means for supporting an object (e.g. a patterned substrate) having a finely patterned surface on which predetermined patterns are formed, which is illuminated at a predetermined angle with the lights from the illuminator ; and determining means for determining whether or not predetermined patterns on the surface of the object (substrate) are deformed using lights diffracted by the finely patterned surface , wherein the illuminator applies two kinds of lights each having a narrow wavelength range with a peak wavelength at a respective one of two complementary colors.

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Shiga, Japan

Tsuyoshi Iguchi