Sumitomo Precision Products Co., Ltd.

Tsuyoshi Fujimura

Takafumi Moriguchi

Takashi Ikeda

Ryuta Araki

Hiroshi Nishida

Osamu Torayashiki

Yasuyuki Hirata

Mitsuhiko Takemura

Nobutaka Teshima

A vibrating gyroscope according to this invention includes a ring-shaped vibrating bodyhaving a uniform plane, a leg portionflexibly supporting the ring-shaped vibrating body and having a fixed end, a fixed potential electrode, and a plurality of electrodesformed on the plane with a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in a thickness direction thereof. In this case, in a representative example shown in FIG., when one of driving electrodesfor exciting a primary vibration of the ring-shaped vibrating bodyin a vibration mode of cos N&#x3b8; is set as a reference driving electrode, the plurality of remaining electrodesare disposed at specific positions. Such disposition allows this vibrating gyroscope to detect a uniaxial to triaxial angular velocity by adopting a secondary vibration detector inclusive of an out-of-plane vibration mode.

Vibratory gyroscope using piezoelectric film

A vibrating gyroscope comprises a ring-shaped vibrating body () a leg portion () flexibly supporting the body () and having a fixed end, a fixed potential electrode (), and a plurality of electrodes (-) with a piezoelectric film sandwiched between an upper and a lower-layer metallic film in a thickness direction thereof. When N is a natural number of 2 or more, the plurality of electrodes (-) include driving electrodes () for a primary vibration in a vibration mode of cosN&#x3b8;, which are each disposed (360/N)&#xb0; apart from each other in a circumferential direction, first detection electrodes () and second detection electrodes () for detecting a secondary vibration generated when an angular velocity is applied to the body (), which are each disposed in a certain region related to the driving electrode () Each of the electrodes is also disposed in a certain region of the body ().

Vibrating gyroscope using piezoelectric film and method for manufacturing same

A vibrating gyroscope according to this invention includes a ring-shaped vibrating bodyhaving a uniform plane, a leg portionflexibly supporting the ring-shaped vibrating body and having a fixed end, a fixed potential electrode, and a plurality of electrodesformed on the plane with a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in a thickness direction thereof. In this case, in a representative example shown in FIG., when one of driving electrodesfor exciting a primary vibration of the ring-shaped vibrating bodyin a vibration mode of cos N&#x3b8; is set as a reference driving electrode, the plurality of remaining electrodesare disposed at specific positions. Such disposition allows this vibrating gyroscope to excite a primary vibration in an out-of-plane vibration mode of cos 2&#x3b8; as well as detect a uniaxial or biaxial angular velocity by adopting a secondary vibration detector in an in-plane vibration mode of cos 3&#x3b8;.

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Amagasaki, Japan

Tsuyoshi Fujimura