Panasonic Intellectual Property Management Co., Ltd.

Tsuyoshi Fujii

Kensaku Yamamoto

Satoshi Ohuchi

Hideo Ohkoshi

Shigehiro Yoshiuchi

A sensor includes a sensor element, defined in an XY plane, including a first member, a second member having a first portion extending from the first member in a positive Y axis direction, a second portion extending from the first portion in a positive X axis direction and a third portion extending from the second portion in a negative Y axis direction, and a third member having a first section and a second section having a rectangular shape in a top view respectively. The first portion, the second portion and the third portion extend along a periphery of the first section in the top view respectively. The second section is connected to the third portion and extends from the first section in a positive Y axis direction. A length of the second member is larger than a length of the third member in a positive X axis direction.

Angular velocity sensor

An inertial force sensor that can suppress fluctuation of detection sensitivity even if an external stress is applied to the inertial force sensor. Angular velocity sensor (), that is, an inertial force sensor includes ceramic substrate (), lower lid () adhering to ceramic substrate () with adhesives (and) (first adhesives), and sensor element () adhering to lower lid () with adhesives (and) (second adhesives). The elastic moduli of adhesives (and) are smaller than those of adhesives (and).

Angular velocity sensor for suppressing fluctuation of detection sensitivity

An angular velocity sensor includes a sensor element having a shape defined in an XYZ space, and can detect an angular velocity about a Z axis. The sensor element includes a support body extending in a direction of an X axis, an arm connected with the support body, and a weight connected with the arm. The arm has a first end connected with the support body and a second end connected with the weight. The arm has substantially a J-shape including a first arm portion extending in a direction of a Y axis from the first end to a first corner, a second arm portion extending in the direction of the X axis from the first corner to a second corner, and a third arm portion extending in the direction of the Y axis from the second corner to the second end. The length of the arm in the direction of the X axis is larger than the length of the weight in the direction of the X axis. This angular velocity sensor can improve the sensibility to angular velocity about the Z axis.

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Osaka, Japan

Tsuyoshi Fujii