Wako Pure Chemical Industries, Inc.

Fujifilm Corporation

Fujifilm Wako Pure Chemical Corporation

Tsutomu Watahiki

Kuniaki Okamoto

Motoshige Sumino

Takahiro Kiyosu

Kohei Hayashi

Ayako Kuramoto

Kouki Ohkubo

Tatsuko Ikeda

Takayuki Kajikawa

Kazuhiko Sato

Hironori Mizuta

Goro Mori

Takahiro Yokomizo

Yoshihisa Tsurumi

Takao Shibasaki

Satoshi Shirahata

The present invention addresses the problem of providing a kit for a cleaning agent, which is used for the purpose of preparing a cleaning agent that maintains, even after long-term storage, adequate impurity removal performance from the surface of a semiconductor substrate that has been subjected to a CMP process. The present invention also addresses the problem of providing a method for preparing the above-described cleaning agent. A kit for a cleaning agent according to the present invention is a kit for preparing a cleaning agent which is used for cleaning of a semiconductor substrate that has been subjected to a CMP process, and which has a pH of from 7.5 to 13.0. This kit for a cleaning agent comprises a first liquid that is acidic and contains a compound represented by formula (1) and a second liquid that is alkaline and contains a basic compound; and an acidic compound is contained in at least one of the first liquid and the second liquid.

Kit for cleaning agent and method for preparing cleaning agent

It is an object of the present invention to provide an electrochemical device having an electrolytic solution having high current density, as well as high safety, where dissolution and deposition of magnesium progress repeatedly and stably. Furthermore, the present invention relates to an electrolytic solution for an electrochemical device, comprising (1) a supporting electrolyte comprising a magnesium salt, and (2) at least one or more kinds of the compound represented by following general formula (I) (wherein n represents an integer of 0 to 6, and n pieces of Rand n pieces of Reach independently represent a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, or a halogenoalkyl group having 1 to 6 carbon atoms. Aand Aeach independently represent &#x2014;C(&#x2550;O)&#x2014;R, &#x2014;O&#x2014;R, &#x2014;N(R)&#x2014;R, &#x2014;S&#x2014;R, &#x2014;C(&#x2550;O)&#x2014;OR, &#x2014;O&#x2014;C(&#x2550;O)&#x2014;R, &#x2014;C(&#x2550;O)&#x2014;N(R)&#x2014;R, &#x2014;N(R)&#x2014;C(&#x2550;O)&#x2014;R, &#x2014;SO&#x2014;R, &#x2014;N(R)&#x2014;SO&#x2014;R, &#x2014;O&#x2014;B(OR), &#x2014;O&#x2014;P(&#x2550;O)(OR), &#x2014;CN, a monocyclic heterocyclic group, a group derived from cyclic acetal, a group derived from a cyclic carbonate ester, a group derived from a cyclic carboxylate ester).

Electrolyte solution for electrochemical device, and electrochemical device

The present invention relates to a cleaning agent for a semiconductor substrate having a copper wiring film or a copper alloy wiring film, and a cobalt-containing film to be used in a post-process of a chemical mechanical polishing process, comprising (A) an organic acid represented by general formula described in the present specification, (B) amines selected from the group consisting of (B-1) diamines, (B-2) amidines, (B-3) azoles, and (B-4) pyrazines or pyrimidines, represented by general formulae described in the present specification, (C) a hydroxylamine derivative, and (D) an oxygen scavenger represented by general formula described in the present specification, and being an aqueous solution having a pH of 10 or higher; and a processing method for the surface of a semiconductor substrate, having a copper wiring film or a copper alloy wiring film, and a cobalt-containing film, which comprises using the cleaning agent.

Cleaning agent for semiconductor substrates and method for processing semiconductor substrate surface

It is an object of the present invention to provide an electrochemical device having an electrolytic solution having high current density and high oxidation resistance, as well as high safety, where dissolution and deposition of magnesium progress repeatedly and stably. The present invention relates to the electrolytic solution for an electrochemical device comprising (1) the supporting electrolyte composed of a magnesium salt and (2) at least one or more kinds of the compound represented by the following general formula [2], as well as the electrochemical device comprising said electrolytic solution, a positive electrode, a negative electrode and a separator. 

Electrolyte solution for electrochemical devices

The present invention provides a non-aqueous electrolytic solution including a methylenebissulfonate derivative and improving initial irreversible capacity and other characteristics of a battery such as a cycle characteristics, electric capacity, and storage characteristics; a method for producing thereof; and a battery using the electrolytic solution. The non-aqueous electrolytic solution includes: (1) a non-aqueous solvent comprising at least one selected from a cyclic carbonate ester, a straight chained carbonate ester and/or a cyclic carboxylic acid ester, (2) a lithium salt which may be dissolved in the non-aqueous solvent, as an electrolyte salt, and (3) a methylenebissulfonate derivative of formula [1]:  The method includes steps of dissolving a lithium salt in a non-aqueous solvent, and then dissolving the methylenebissulfonate derivative. The non-aqueous electrolytic solution battery includes (i) the non-aqueous electrolytic solution, (ii) a negative electrode, (iii) a positive electrode, and (iv) a separator.

Nonaqueous electrolyte solution and nonaqueous electrolyte battery using same

The present invention provides a non-aqueous electrolytic solution including a methylenebissulfonate derivative and improving initial irreversible capacity and other characteristics of a battery such as cycle characteristics, electric capacity, and storage characteristics; a method for producing thereof; and a battery using the electrolytic solution. The non-aqueous electrolytic solution includes: (1) a non-aqueous solvent comprising a cyclic carbonate ester, a straight chained carbonate ester, and/or a cyclic carboxylic acid ester, (2) a lithium salt which may be dissolved in the non-aqueous solvent, as an electrolyte salt, and (3) a methylenebissulfonate derivative of formula [I]: The method includes steps of dissolving a lithium salt in a non-aqueous solvent, and then dissolving the methylenebissulfonate derivative. The non-aqueous electrolytic solution battery includes (i) the non-aqueous electrolytic solution above, (ii) a negative electrode, (iii) a positive electrode, and (iv) a separator.

Nonaqueous electrolyte solution, method for producing same, and nonaqueous electrolyte battery using the electrolyte solution

The present invention is directed to provide an efficient production method which is capable of not only obtaining a cyclic sulfonic acid ester (sultone) at low cost and in high yield, but also the sulfonic acid ester (sultone) stably even in a commercial scale. The present invention relates to a method for producing hydroxysultone comprising a first step where a diol having a specified structure and a thionyl halide are reacted to obtain a cyclic sulfite having a specified structure, and a second step where the cyclic sulfite is reacted with water or/and alcohol; a method for producing an unsaturated sultone having a specified structure comprising a third step where a hydroxylsultone having a specified structure is reacted with an acid halide or an acid anhydride to obtain an intermediate, subsequently the intermediate is treated with a base; as well as a cyclic sulfite having a specified structure.

Method for producing cyclic sulfonic acid ester and intermediate thereof

It is an object of the present invention to provide a commercially advantageous method for producing a cyclic disulfonic acid ester with high yield, the present invention discloses a method for producing a cyclic disulfonic acid ester represented by the general formula (3), which comprises reacting a silver alkanedisulfonate represented by the general formula (1) with a dihaloalkane represented by the general formula (2) in a nonpolar solvent.  Wherein Xand Xare each independently a chlorine atom, a bromine atom or an iodine atom; and Y and Z are each independently a substituted or unsubstituted alkylene chain which may have a heteroatom in the chain.

Method for producing cyclic disulfonic acid ester

Object To provide a method for producing a bis-quaternary ammonium salt efficiently and a novel synthetic intermediate thereof. Solution The present invention relates to a method for producing a bis-quaternary ammonium salt represented by a general formula [3] which comprises reacting a disulfonic acid ester represented by a general formula [1] (in the formula, definitions of two R's and T are as described in claim) with a tertiary amine represented by a general formula [2] (in the formula, definitions of Rto Rare as described in claim), and a disulfonic acid ester represented by a general formula [1'] (in the formula, two R's represent independently a halogen atom or a C1-C3 fluoroalkyl group, and two m's represent independently an integer of 1 to 5). 

Process for production of bis-quaternary ammonium salt, and novel intermediate

Problem: Providing a novel ionic liquid, which is low-cost, environment-friendly, and has low viscosity and melting point. Means for Solving the Problem: The present invention is the invention of the ionic liquid represented by the general formula [1]: {wherein, Rto Rand n pieces of Reach independently represent hydrogen atom or alkyl group having 1 to 4 carbon atoms, Rto Reach independently represent alkyl group, aralkyl group, or aryl group, Rrepresents alkyl group, aralkyl group, aryl group, or the one represented by the general formula [2]: (wherein T represents alkylene chain having 1 to 8 carbon atoms, n represents 1 or 2, and Rto Rare the same as the above-described), X represents nitrogen atom or phosphorus atom, n represents 1 or 2. When n is 1, Rand Rare bound and may form cyclohexene ring together with the adjacent carbon atoms. In addition, when X is nitrogen atom, Rto Ror Rto Rmay form hetero ring with nitrogen atom binding thereto}.

Ionic liquid containing allylsulfonate anion

The present invention provides a method for producing a sulfonate ester efficiently and in high yield. The present invention is an invention of a method for producing a sulfonate ester compound, which comprising reacting: (wherein, Rrepresents an optionally substituted alkyl group or an optionally substituted aryl group)];in the presence of an organic base which is capable of forming a salt with said sulfo group.

Growing community of inventors

Kawagoe, Japan

Tsutomu Watahiki