Other

Mitsubishi Denki Kabushiki Kaisha

Dainippon Screen Mfg. Co., Ltd.

Tsutomu Takeuchi

Susumu Yoshida

Sirikiat Ariyavisitakul

Fumio Ikegami

Akira Izumi

Akira Usami

Kazunori Matsuki

Masaaki Sasada

Tsuyoshi Matsuka

A liquid agent evaporator includes a sealed container accommodating a liquid agent therein and having a generally flat upper internal face and a vapor outlet, a carrier gas feeder for feeding the carrier gas into the sealed container, and a carrier gas blower provided in the upper internal surface of the sealed container for blowing the carrier gas fed from the carrier gas feeder so that the blown carrier gas comes into contact with substantially the entirety of the upper internal surface of the sealed container. The carrier gas blower is provided, for example, at the center of the upper internal surface of the sealed container and blows the carrier gas radially at an initial velocity directed at least to the upper internal surface side of the sealed container. The carrier gas blower can include a gas blow tube which is communicated with a gas feed tube and has a plurality of gas outlets formed on the top face side of the gas blow tube. By translating the gas blow tube so that the top face thereof comes to be in close proximity to the top face of the sealed container, the carrier gas blown from the gas outlets can reach substantially the entirety of the upper internal surface of the sealed container.

Liquid agent evaporator

Applying a first light (.lambda.=950 nm) to a Si wafer to generate electron-hole pairs, a microwave is emitted to the Si wafer and the amount of reflection of the microwave is measured. In like manner, applying a second light (.lambda.=633 nm), the amount of reflection of the microwave is measured. The two amounts are normalized by intensities of the lights respectively. In order to cancel an error resulting from geometrical position between a measuring apparatus and the Si wafer, a normalized finite difference is calculated through subtraction between the normalized amounts. The difference may be obtained by another calculation so that it stays in a specified width when a uniformly doped Si wafer is measured.

Method for inspecting an electronic state of a surface of a

Digital communication system

A digital communication system, in which digital information is represented by a quaternary information symbol (11, 01, 00, 10) and the double step phase shift, each step represented by (.pi./4, 3.pi./4, 5.pi./4, 7.pi./4), is performed per 1/2 time slot in correspondence to each information symbol, so that the number of phase shift per unit time in the case of the identical transmission rate can be decreased to 1/2, as compared with a .DELTA..theta./2-DSK system, and expansion of the bandwidth can be decreased to 1/2.

The present invention provides a digital communication system in which one time slot is divided into a first half section and a second half section and the carrier phase difference .theta. between each neighboring first half section is set to either (.pi., 0) with respect to a binary information symbol (1,0) or (0, .pi./2, .pi., 3/2.pi.) with respect to a quaternary information symbol (11, 01, 00, 10). In addition, the phase difference .psi. between the first half and the second half of any time slot is a constant value .psi..sub.0 (for example, .pi.rad) irrespective of the symbol, or .psi..sub.i determined with respect to a symbol (for example, +.pi./2 with respect to a symbol 1 or -.pi./2 with respect to a symbol 0). Therefore, an arbitrary complementary characteristic can be obtained when differentially demodulated in a multipath fading channel, irrespective of the amplitude characteristic of a demodulation signal.

The present invention provides a communication system which employs a signal whose carrier phase is shifted by a constant amount .DELTA..theta. per time slot in correspondence to each symbol (1 or 0) transmitted, and the phase shift is performed by .DELTA..theta./2 (or -.DELTA..theta./2) in the first 1/2 time slot and further by .DELTA..theta./2 (or -.DELTA..theta./2) in the second 1/2 time slot thereby to improve the bit error rate in multipath propagation.

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Kyoto, Japan

Tsutomu Takeuchi