Rigaku Corporation

Tsutomu Tada

Kazuhiko Omote

Licai Jiang

Boris Verman

Masahiro Nonoguchi

Yuriy Platonov

Yukio Sako

Makoto Kambe

Hajime Fujimura

Toshifumi Higuchi

To measure a pulse height of an X-ray signal at high speed and with high precision even for high count rate X-ray measurement regardless of the type of an X-ray detector and a circuit configuration of a preamplifier, provided is an X-ray spectrometer including: a learning unit which acquires a part of a stepped wave including a rise portion through use of incident time, and generates a trained model which has learned a correlation between a acquired part and a pulse height through use of training data including a plurality of combinations of the acquired part and the pulse height; and a pulse height predictor which acquires a part of the stepped wave from the newly converted stepped wave through use of the incident time, and calculates a predicted pulse height from the acquired part of the stepped wave and the trained model.

X-ray spectrometer and pulse height prediction program

Provided is a total reflection X-ray fluorescence spectrometer which has high analysis sensitivity and analysis speed. The total reflection X-ray fluorescence spectrometer includes: an X-ray source that has an electron beam focal point having an effective width in a direction parallel to a surface of a sample, and orthogonal to an X-ray irradiation direction, that is larger than a dimension in the irradiation direction; a reflective optic that has an effective width in the orthogonal direction that is larger than that of the electron beam focal point, and has a curved surface in the irradiation direction; and a plurality of detectors that are arranged in a row in the orthogonal direction, and are configured to measure intensities of fluorescent X-rays emitted from the sample irradiated with primary X-rays focused by the reflective optic.

Total reflection x-ray fluorescence spectrometer

Provided is an X-ray signal processor and an X-ray spectrometer that are configured to measure X-rays and, at the same time, accurately detect, with a simple method, the degree of performance degradation of a semiconductor detector. The X-ray signal processor includes: a semiconductor detector configured to generate a charge corresponding to energy of detected X-rays; a preamplifier configured to output a ramp voltage signal corresponding to the generated charge; a counter configured to count the X-rays for each voltage change amount due to the charge based on the ramp voltage signal; and a judgment part configured to determine whether the semiconductor detector has been degraded based on a first voltage change evaluation value corresponding to a total sum of products of the voltage change amount and an occurrence frequency thereof, and a second voltage change evaluation value corresponding to an increase amount of the ramp voltage signal.

X-ray signal processor and x-ray spectrometer

Provided are a signal processing device for X-ray analysis and an adjustment method for a signal processing device for X-ray analysis, which are capable of performing correction of a time constant with high precision and simply and quickly performing adjustment work required for performing the correction. The signal processing device for X-ray analysis includes: a differentiating circuit configured to use a first time constant to convert a signal output from an X-ray detector into an analog differential wave; an AD converter configured to convert the analog differential wave into a digital differential wave; a waveform shaping digital filter configured to use a second time constant to shape the digital differential wave; and a histogram generation unit configured to acquire a feature value of a shaped waveform based on pulse heights in two regions of the shaped waveform, to generate a histogram representing an acquisition frequency for each feature value.

Growing community of inventors

Ibaraki, Japan

Tsutomu Tada