Japan Electronic Materials Corporation

Tsutomu Shoji

Tomohiro Kinoshita

Tatsunori Shimizu

Yuji Kawasaki

Suppresses reflection from a circuit board including a light-transparent insulating film formed on an interlayer wiring to easily identify an alignment mark formed on a probe. The probe card comprises a circuit boardon which an insulating filmand an electrode padare formed and a probeattached onto the electrode pad. The probehas an alignment markidentifiable from an opposite side of the circuit board. The alignment markis positioned outside of the electrode padon the circuit board. The insulating filmis a light-transmissive thin film covering an interlayer wiring. An anti-reflection filmwith lower light transmittance than the insulating filmis formed in some regions on the insulating film. The anti-reflection filmis formed on a position corresponding to the alignment markand a region surrounding the position.

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Hyogo, Japan

Tsutomu Shoji