Fujikin Inc.

Tokyo Electron Limited

Other

Tohoku University

Koganei Corporation

Tadahiro Ohmi

Connectec Japan Corporation

Fujikin Irc.

Fujikin Incorporation

Sasada Magnetics and Sensors Laboratory Co., Ltd.

Ohmi,tadahiro, Miyagi

Tsutomu Shinohara

Michio Yamaji

Tomohiro Nakata

Nobukazu Ikeda

Toshihide Yoshida

Ryutaro Tanno

Takahiro Matsuda

Akihiro Harada

Kenji Aikawa

Kazunari Watanabe

Yuya Suzuki

Kouji Nishino

Toshiyuki Inada

Tetsuya Kojima

Kenji Tsubota

Ryousuke Dohi

Kohei Shigyou

Kenta Kondo

Ichiro Tokuda

Masahiko Ochiishi

Masaaki Nagase

Kaoru Hirata

Katsuyuki Sugita

Takashi Hirose

Shigeru Itoi

Masahiko Takimoto

Hidenobu Sato

Hidenori Kiso

Tomokazu Imai

Keiji Hirao

Shuji Moriya

Hiroshi Morokoshi

Takeru Miura

Hisashi Tanaka

Katsunori Komehana

Kazuhiro Yoshikawa

Akihiro Morimoto

Eiji Ideta

Kazuyuki Miura

Kosuke Yokoyama

Tsuyoshi Shimazu

Shoichi Hino

Masahito Saito

Kenji Yamamoto

Norihiko Amikura

Yukio Minami

Wataru Okase

Nobuo Nakamura

Satoshi Kagatsume

Yukio Naito

Tomoko Yuhara

Taichi Kitano

Satoshi Muto

Masahiko Satoh

Tsuneyuki Okabe

Koji Kawada

Izuru Shikata

Naofumi Yasumoto

Mutsunori Koyomogi

Masahiko Nakazawa

Ryosuke Dohi

Hiroyuki Fukuda

Takashi Funakoshi

Shigeaki Tanaka

Koji Nishino

Kunio Nagai

Tatsuhiko Sato

Susumu Ozawa

Hajime Nakagawa

Yasuyuki Omata

Tadanobu Yoshida

Kenichi Sato

Yasutaka Hayashi

Yuta Motegi

Ichiro Mine

Yuto Kawauchi

Daihi Tsuchiguchi

Kengo Tsujino

Toshio Doh

Akira Watanabe

Yasuyuki Shirai

Tadayuki Yakushijin

Tsuyoshi Tanikawa

Yohei Sawada

Ryutaro Nishimura

Ichiro Sasada

Yuji Kawano

Takahiro Imai

Shinya Nojima

Kenji Tubota

Tomoki Nakada

Toshio Nariai

Yukito Katsumi

Yoshiaki Watanabe

Kazutoshi Horikawa

Toru Nebashi

An operation information collection system for a fluid control device configured as an operation information collection module includes a detected value acquisition unit acquiring a detected value of a state change or a device operation able to detect opening/closing operations from the fluid control device, a calculation processing unit calculating a rate of change of detected values separated by a predetermined time based on the detected value, and an operation information registration unit registering the rate of change of the detected values separated by the predetermined time to an operation information storage unit as an operation information of the fluid control device.

Operation information collection system for fluid control device, fluid control device, operation information collection method for fluid control device, and computer executable program

A fluid control devicecomprises a valve device Vincluding actuatorsandfor opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V, and a control circuitconnected to the valve device Vand the pressure sensor PT, and the control circuitcontrols an operation of the actuator based on a pressure measured by the pressure sensor PT and a reference pressure drop curve, while the upstream side of the fluid control device is closed and the valve device is opened using the actuators.

Fluid control device, fluid supply system, and fluid supply method

Provided is a fluid control device that is compact and that enables data regarding an internal operation of the device to be acquired. A fluid control device V is disposed in a flow path of a fluid and enables data regarding an internal operation to be acquired, the fluid control device including a sensor hoodto which one or more sensors Mfor detecting an operation in the fluid control device are attached; a valve bodyconnected to the sensor hood; a diaphragmheld below the sensor hood, inside the valve body; a cover portionthat covers the outer periphery of the sensor hood; and a circuit boardthat is electrically connected to the sensor(s) and for which a thickness direction of the circuit board and a flow path direction are arranged in the same direction on the inside of the cover portion.

Fluid control device

To enable accurate and simple diagnosis of an operation abnormality of a valve. A valve Vcapable of detecting an operation abnormality has a magnet Mthat is attached in the vicinity of a pressing adapterof a stemthat slides according to an opening/closing operation of the valve V, and a magnetic sensor Mthat is attached to a surface acing the stem, inside the pressing adapterthat presses a peripheral edge of a diaphragm, and detects a change in a distance between the magnet Mand the magnetic sensor M. Further, an abnormality determination mechanism compares the change in the distance between the magnet Mand the magnetic sensor Mat the time of abnormality diagnosis detected by the magnetic sensor Mand a previously measured change in the distance between the magnet M and the magnetic sensor Mat the time of normality, and determines whether or not there is an abnormality.

Valve, abnormality diagnosis method of valve

A valve which can accurately detect an operation of the valve is provided. The valve includes a valve body defining a fluid flow passage, a valve disk operating to be able to open and close the fluid flow passage, an actuator driving the valve disk by supplying or interrupting a working fluid, a stem transmitting a driving force of the actuator to the valve disk, a detection means detecting an opening and closing operation of the valve disk, and an elastic member fixing a ring-shaped magnetic body inserted through an end of the stem to the stem. The detection means includes the magnetic body fixed by the elastic member, and a magnetic sensor detecting a change in a magnetic field of the magnetic body.

Valve and fluid control device with a magnetic indicator

A fluid control device, capable of detecting leaks even if the leaks is slight, is provided. Further, a fluid leak abnormality is identified as a change accompanying an operation of the fluid control device and the fluid leaks is detected with high accuracy. A fluid control device, having a flow path and a closed space isolated from the flow path by a diaphragm and capable of detecting an abnormality, includes a pressure sensor detecting a pressure inside of the closed space, a processing module executing a predetermined information process, and an operation detecting mechanism detecting an operation of the fluid control device. The processing module executes a discriminating process discriminating abnormality of the fluid control device by comparing a detected value detected by the pressure sensor with a predetermined threshold value, and a correcting process correcting the predetermined threshold value in accordance with the operation of the fluid control device.

Fluid control device, abnormality detection method of fluid control device, abnormality detection device, and abnormality detection system

An entire fluid supply line or an entire fluid controller constituted by a plurality of fluid control devices is precisely monitored. A fluid controller G accumulating and having a plurality of fluid control devices A. The fluid control devices A include an operation information acquisition mechanism acquiring an operation information in the fluid control devices, an identification information storagestoring a self-identification information, and a communication processing unittransmitting the operation information acquired by the operation information acquisition mechanism to an external terminal with the self-identification information stored in the identification information storageat different timings for each of the fluid control devices A.

Fluid control apparatus, fluid control device, and operation analysis system

A diaphragm valve includes a valve body that defines a flow path through which fluid flows and an opening that opens to the outside in a middle of flow path; a flexible partition member that covers the opening and separates the flow path from the outside, and changes a cross-sectional area of the flow path; and a flexible support member disposed on a rear surface side opposite to a flow path side of the flexible partition member. A housing is fixed to the valve body via peripheral portions of the flexible partition member and the flexible support member. A humidity sensor that detects a state of an atmosphere or a change thereof in a space defined by the flexible support member and an inner surface of the housing. The diaphragm valve is capable of preventing fluid in a diaphragm valve from leaking to the outside due to breakage of a diaphragm.

Diaphragm valve and monitoring method thereof with improved leak detection

A flow-path forming block includes: a first block; a second block attached to the first block, the second block having a first flow path and a second flow path; and a gasket provided between the first block and the second block, the gasket being configured to seal between the first block and the second block, wherein the second block has a communication portion formed on a surface facing the gasket, the communication portion being configured such that the first flow path and the second flow path are communicated, and the gasket has a recessed portion formed at a position facing the communication portion.

Flow-path forming block and fluid control device provided with flow-path forming block

A fluid control device includes: a joint block defining a fluid flow path open to an upper surface thereof, and which has an engaging portion on the bottom surface side thereof; a support member having a guide portion which restrains the joint block on the upper surface while permitting the joint block to move in longitudinal direction; and a fluid device fixed to the upper surface of the joint block. The support member is provided with at least one plunger such that the tip end portion protrudes from the upper surface of the support member. A recess is provided in the bottom surface of the joint block, and the recess engages with the tip end portion of the plunger to set the position of the joint block in the longitudinal direction.

Fluid control device and manufacturing method for the fluid control device

An electromagnetic valve has an inlet port and an outlet port. The electromagnetic valve is configured to open and close a driving fluid passage communicating the inlet port and the outlet port. The electromagnetic valve includes: a housing; a solenoid that includes a bobbin having a coil wound therearound; a moving core that is provided on an axis of the bobbin and is disposed movably in an axial direction; a stationary core that is provided on the axis of the bobbin and is fixed in the housing; and a valve that is configured to be movable together with the moving core and opens and closes the driving fluid passage. The inlet port is opened on one surface side of the housing in the axial direction of the bobbin while the outlet port is opened on the other surface side of the housing in the axial direction of the bobbin.

Electromagnetic valve, valve device, fluid control device, and electromagnetic valve replacement method

A valve device includes: a body formed with a valve chamber, a first inflow passage, a second inflow passage, an outflow passage, and an annular groove and provided with a valve seat; and a diaphragm configured to communicate with and interrupt the second inflow passage and the outflow passage. An end portion of the second inflow passage is open to the valve chamber. The valve seat is provided on a peripheral edge of a location where the valve chamber and the second inflow passage communicate with each other. The annular groove is open to the valve chamber and is formed around the second inflow passage. An end portion of the outflow passage is open to the annular groove. The first inflow passage has a plurality of flow passages including an inflow port and a plurality of outflow ports, and each outflow port is open to the annular groove.

Valve device

A work management apparatus, method, and system enable to accurately manage position, tightening torque and other information for all fastening parts, for tightening work using a tool with a torque sensor. The system includes: a driver provided with a torque sensor; and first and second cameras that capture images of a product from different viewpoints. The torque sensor starts measurement of the tightening torque when a detected tightening torque exceeds a set threshold value, stops measurement of the tightening torque when the measurement data satisfies a predetermined condition, and outputs torque related data that includes measurement time. The system further includes: a PC that calculates coordinates of an engagement position of a bit from a plurality of image data captured by the first and the second cameras corresponding to the measurement time included in the torque related data; and a marker mounting device provided with a marker and removably mounted to the bit.

Work management apparatus, work management method, and work management system

A valve device capable of precisely adjusting a flow rate includes: an operating member for operating a diaphragm and provided movably between a closed position at which diaphragm closes a flow path and an open position at which diaphragm opens the flow path; a main actuator that receives pressure from a supplied drive fluid and moves the operating member to the open position or the closed position; an adjusting actuator for adjusting the position of the operating member positioned in the open position by using a passive element which expands and contracts in response to a given input signal; a position detecting mechanism for detecting the position of the operating member with respect to a valve body; and an origin position determining unit that uses a valve closed state in which the diaphragm contacts to valve seat to determine an origin position of the position detecting mechanism.

Valve device, flow rate control method, fluid control device, semiconductor manufacturing method, and semiconductor manufacturing apparatus using the valve device

Growing community of inventors

Osaka, Japan

Tsutomu Shinohara