Hokuriku Electric Industry Co., Ltd.

Tsutomu Sawai

Masato Ando

Yoshiyuki Nakamizo

Masayoshi Minami

Hiroki Hayashi

Shigeru Hirose

Kazuya Komori

Takeshi Arikura

A force detector capable of preventing short-circuit fault between electrodes and allowing for downsizing. A prescribed region encompasses a projection region defined by projecting a deformation region of a force sensor element, which is deformed when a force transmission member applies a force to the force sensor element, onto a base substrate. A plurality of terminals are provided by four soldering land electrodes formed, respectively, at four corners of the base substrate. The soldering land electrodes are shaped such that a portion of each soldering land electrode is located within the projection region to form a soldering portion.

Force detector

Pressure sensitive sensor

A semiconductor sensor of which the thickness may be reduced and a method of manufacturing a sensor body for the semiconductor sensor are provided. A total length Lof a weight portionand an additional weight portionas measured in an extending direction of a centerline C is determined to be shorter than a length Lof a support portionas measured in the extending direction of the centerline C. The weight portionand the additional weight portionare received within a spacedefined, being surrounded by the support portion. Then, dimensions and shapes of the weight portionand the additional weight portionare determined to allow the weight portionand the additional weight portionto move within the space

Semiconductor sensor and manufacturing method of sensor body for semiconductor sensor

The present invention provides a semiconductor acceleration sensor wherein a semiconductor element is prevented from being damaged even when at least part of a weight is disposed in an internal space of a semiconductor sensor element and the mass of a weight is accordingly increased. An inner peripheral surface of a support portionis constituted by four trapezoidal inclined surfacesof a substantially identical shape which are annularly combined so as to define an outer peripheral surface of a frust-pyramidal space. A weightis so constructed as to have an abutting portion including a linear portionwhich abuts against the inclined surfacesconstituting the inner peripheral surface of the support portionwhen the weightmakes a maximum displacement in a direction where a diaphragm portionis located. The abutting portionhas a circular outline shape as seen from a side where a weight fixing portionis located. A stopper structure is constituted by the inclined surfacesand the abutting portionof the weight, for restricting a displacement range of the weightin the direction where the diaphragm portionis located.

Semiconductor acceleration sensor and process for manufacturing the same

An acceleration detecting device capable of permitting a weight, a diaphragm and a base to be precisely positioned on a casing of a measuring equipment or the like. The weight, diaphragm and base are integrally formed of a metal material into a single unit. An insulating casing is integrally formed while incorporating the single unit as an insert therein. The insulating casing has a recess defined by a side wall thereof, which is formed with a window for exposing a part of the base therethrough. The recess of the casing is closed with a metal cover member, which is mounted on the casing. The cover member is integrally provided with a contactor which is elastically forced against the base through the window. The base is electrically connected to ground terminals of terminal fitments.

Growing community of inventors

Toyama, Japan

Tsutomu Sawai