Nikon Corporation

Nikon Research Corporation of America

Tsutomu Ogiwara

Pai-Hsueh Yang

Michael B Binnard

Bausan Yuan

Chetan Mahadeswaraswamy

Kazuhiro Hirano

J Kyle Wells

A method for moving a stage relative to a base includes coupling a magnet assembly to the stage; coupling an array of coils to the base; and directing current to at least one of the coils with a control system that includes a processor to generate a force that levitates the stage relative to the base and moves the stage relative to the base. In one embodiment, the control system generates at least one current command that levitates and moves the stage while inhibiting the excitation of a first targeted flexible mode.

Motor with force constant modeling and identification for flexible mode control

A stage assembly for positioning a device includes: (i) a stage that retains the device; (ii) a base; (iii) a mover assembly that moves the stage along a first axis, along a second axis, and along a third axis relative to the base; (iv) a magnetic sensor system that monitors the movement of the stage along the first, second and third axes, the magnetic sensor system generating a magnetic sensor signal; (v) a second sensor system that monitors the movement of the stage along the first, second and third axes, the second sensor system generating a second sensor signal; and (vi) a control system that controls the mover assembly using at least one of the magnetic sensor signal and the second sensor signal.

Magnetic sensor calibration and servo for planar motor stage

Growing community of inventors

Saitama-ken, Japan

Tsutomu Ogiwara