Seiko Epson Corporation

Ube Industries, Inc.

Seik Epson Corporation

Tsutomu Nishiwaki

Masato Shimada

Koji Sumi

Hong Qiu

Masami Murai

Yoshinao Miyata

Kouji Sumi

Shiro Yazaki

Eiju Hirai

Tomoaki Nakamura

Minoru Usui

Setsuya Iwashita

Tetsushi Takahashi

Akira Matsuzawa

Tsutomu Hashizume

Hiroyuki Kamei

Masanori Okuyama

Hiroshi Kato

Zhiqiang Wei

Xin-Shan Li

Masanori Tanizaki

Shinri Sakai

Haruo Nakamura

Masaru Hoshino

Kazumasa Hasegawa

Makoto Matsuzaki

Kaoru Momose

Tsutomu Asakawa

Soichi Moriya

Jiro Tsuruno

Ichiro Asaoka

Kazushige Hakeda

Tomokazu Kobayashi

Toshihiko Anno

Hajime Mizutani

Toshinao Shinbo

Souichi Moriya

Li Xin-Shan

Kazuo Hashimoto

Akihito Tsuda

Masataka Yamada

Zhi Quiang Wei

A liquid ejecting head includes a nozzle substrate in which a nozzle that ejects a liquid is formed and a flow path substrate that is joined to the nozzle substrate. The flow path substrate includes a pressure chamber that communicates with the nozzle and a first liquid storage chamber that stores the liquid to be supplied to the pressure chamber. The nozzle substrate includes a first damper chamber and one or more first hole portions which communicate with the first liquid storage chamber and the first damper chamber and in which a meniscus for absorbing a pressure fluctuation of the liquid in the first liquid storage chamber is formed.

Liquid ejecting head and liquid ejecting apparatus

A liquid ejecting head includes a substrate where a first nozzle and a second nozzle that eject liquid. The substrate is formed with a plurality of hole portions which communicate with a supply liquid chamber and in each of which a meniscus for absorbing pressure variation of liquid inside the supply liquid chamber is formed. The plurality of hole portions include a first hole portion. A distance between an end portion of a first supply flow path on a side of the supply liquid chamber and the first hole portion is equal to a distance between an end portion of a second supply flow path on a side of the supply liquid chamber and the first hole portion.

A liquid discharge head includes a pressure chamber that accommodates a liquid, a diaphragm that forms a wall surface of the pressure chamber, and a piezoelectric element that is provided on an opposite side of the pressure chamber with the diaphragm interposed between the piezoelectric element and the pressure chamber and vibrates the diaphragm. The diaphragm includes a silicon oxynitride layer formed with including silicon oxynitride.

Liquid discharge head, liquid discharge apparatus, piezoelectric device, and ultrasonic sensor

Provided is a liquid ejecting head including a pressure chamber to accommodate a liquid, a vibration plate, a nozzle to eject the liquid, and a piezoelectric element. The piezoelectric element includes a piezoelectric body layer, a first electrode disposed on one surface of the piezoelectric body layer, and a second electrode disposed on the other surface of the piezoelectric body layer. The liquid ejecting head further includes wiring connected to the second electrode and extended along a surface direction of the piezoelectric body layer, and does not include a metal layer having the same potential as the first electrode in a first area which is an area positioned between the wiring and the vibration plate and in which the wiring overlaps with none of the second electrode and the piezoelectric body layer in a direction perpendicular to a surface direction of the second electrode.

Liquid ejecting head, liquid ejecting apparatus, and piezoelectric device

A stress-detecting element includes a support body, a support film, a first piezoelectric element, first and second elastic parts. The support body has an opening part with first and second rectilinear sections extending parallel to each other. The support film blocks off the opening part. The first piezoelectric element straddles the first rectilinear section from an interior area to an exterior area of the opening part as seen in plan view. The first elastic part straddles the first rectilinear section from the interior area to the exterior area of the opening part. The second elastic part straddles the second rectilinear section from the interior area to the exterior area of the opening part. The first and second elastic parts respectively have first and second elastic end sections disposed in the interior area of the opening part and spaced apart from each other.

Stress-detecting element, sensor module, and electronic apparatus

An ultrasonic transducer device includes a first substrate, a plurality of ultrasonic transducer elements, a second substrate and a wiring member. The first substrate defines a plurality of openings arranged in an array pattern. Each of the ultrasonic transducer elements is provided in each of the openings in a plan view. The second substrate includes a first wiring part, and coupled to the first substrate. The wiring member includes a second wiring part electrically connecting the ultrasonic transducer elements to the first wiring part.

Ultrasonic transducer device, probe, electronic instrument, and ultrasonic diagnostic device

An ultrasonic transducer device includes a substrate, a plurality of ultrasonic transducer elements, a wiring substrate and a wiring member. The substrate defines a plurality of openings arranged in an array pattern. Each of the ultrasonic transducer elements is provided in each of the openings on a first surface of the substrate. The wiring substrate is arranged to face a second surface of the substrate that is opposite from the first surface. The wiring substrate includes a first wiring part. The wiring member is connected to the substrate and the wiring substrate. The wiring member includes a second wiring part electrically connecting the ultrasonic transducer elements to the first wiring part.

An ultrasonic sensor includes: a substrate; an ultrasonic transducer disposed on the substrate, and configured and arranged to transmit ultrasonic waves that propagate as plane waves in a direction orthogonal to a surface of the substrate; an acoustic refracting part contacting the ultrasonic transducer, and configured and arranged to refract the ultrasonic waves transmitted from the ultrasonic transducer; an elastically deformable elastic portion contacting the acoustic refracting part; and an ultrasonic reflecting member disposed within the elastic portion, and configured and arranged to reflect the ultrasonic waves. The acoustic refracting part is configured and arranged to refract, toward the ultrasonic reflecting member, the ultrasonic waves transmitted from the ultrasonic transducer.

Ultrasonic sensor, tactile sensor, grasping apparatus, and electronic device

A first piezoelectric element having a first piezoelectric layer and a second piezoelectric element having a second piezoelectric layer, which is different from the first piezoelectric layer, are included on the same substrate. The first piezoelectric layer has a d constant greater than a d constant of the second piezoelectric layer.

Piezoelectric element module, ultrasonic transducer, ultrasonic device, liquid ejecting head, liquid ejecting apparatus, and piezoelectric element module manufacturing method

A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern.

Method of manufacturing a liquid jet head and a liquid jet apparatus

A shear force detection device for detecting a shear force includes: a support body including an opening defined by a pair of straight parts perpendicular to a detection direction of the shear force and parallel to each other; a support film on the support body and closing the opening, the support film having flexibility; a piezoelectric part on the support film and extending astride an inside and outside of the opening and along at least one of the pair of straight parts of the opening when viewed in a plane in which the support body is seen in a substrate thickness direction, the piezoelectric part being bendable to output an electric signal; and an elastic layer covering the piezoelectric part and the support film.

Shear force detection device, tactile sensor and grasping apparatus

A stress sensing device senses a shear force and a pressing force. The stress sensing device includes a support body, a support film, first and second piezoelectric parts and an elastic layer. The support body has an opening defined by a pair of straight parts perpendicular to a sensing direction of the shear force and parallel to each other. The support film having flexibility closes off the opening. The first piezoelectric part is disposed over the support film and straddling an inside portion and an outside portion of the opening along at least one of the straight parts of the opening as seen in plan view. The second piezoelectric part is disposed to the inside portion of the opening and set apart from the first piezoelectric part as seen in the plan view. The elastic layer covers the first piezoelectric part, the second piezoelectric part, and the support film.

Stress sensing device, tactile sensor, and grasping apparatus

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Azumino, Japan

Tsutomu Nishiwaki