Seiko Epson Corporation

Tsutomu Hashizume

Tetsushi Takahashi

Yoshinao Miyata

Masato Shimada

Shinri Sakai

Tsutomu Nishiwaki

Akira Matsuzawa

Yutaka Furuhata

Koji Sumi

Shiro Yazaki

Soichi Moriya

Kazuhiko Fujimori

A method of manufacturing an ink jet recording head. The method includes providing a laminated structure in which a first electrode layer is located on a diaphragm, a piezoelectric layer is located on the first electrode layer, and a second electrode layer is located on the piezoelectric layer and etching the first electrode layer, the second electrode layer and the piezoelectric layer so that a portion of the diaphragm is exposed. In this method, at least the second electrode layer and the piezoelectric layer are etched simultaneously.

Method of manufacturing an ink jet recording head having piezoelectric element

An ink jet recording head comprising: a nozzle orifice for jetting ink; an ink chamber communicating with the nozzle; a diaphragm for pressurizing ink in the ink chamber; a piezoelectric thin film on the diaphragm; and an electrode for the piezoelectric thin film wherein the piezoelectric thin film and the electrode are patterned to the same shape.

Ink jet recording head having piezoelectric element and electrode patterned with same shape and without pattern shift therebetween

AnA method of manufacturing anink-jet recording headcomprising:which includesan elastic sheetprovidingfacingpressure generating chambers;,nozzle orifices, each communicating with the pressure generating chambers;, andpiezoelectric vibrators formed on the elastic sheet, each of the piezoelectric vibrators having, a lower electrode formed on the elastic sheet,the method including forminga piezoelectric layerformedon the lower electrode, andformingan upper electrodeformedon the piezoelectric layer such that theupper electrode faces the respective pressure generating chamber, wherein thearea where the lower electrode, piezoelectric layer and upper electrode overlap is located within an area defined by the pressure generating chamber in the longitudinal direction thereof. Theupper electrodes of the piezoelectric vibrators are positioned independently of each other;andan electrical insulator layer having windows, wherein the electrical insulator layer coversis formed to coverthe upper electrodes;,and a conductor patternconnecting withis connected tothe upper electrodes via the windows of the electrical insulator layer.

Method of manufacturing an ink jet recording head having reduced stress concentration near the boundaries of the pressure generating chambers

An ink-jet printing head comprises: a pressurizing chamber substrate having first and second sides opposing each other; a plurality of pressurizing chambers formed on the first side of the pressurizing chamber substrate; channels formed on the second side of the pressuring chamber substrate to be opposite to the pressuring chambers, respectively; oscillating plate films for pressurizing ink within the respective pressurizing chambers; and piezoelectric thin-film elements, each having upper and lower electrodes and a piezoelectric film sandwiched between the upper and lower electrodes, the piezoelectric thin-film being formed in the channel, wherein at least the upper electrode is formed to have a narrower width than that of the pressurizing chamber. And a method for producing the ink-jet head.

Method of producing an ink-jet printing head

An ink jet recording head comprises a nozzle forming member provided with a plurality of nozzle orifices for jetting ink, a channel forming substrate provided with a plurality of pressure generating chambers communicated with the associated nozzle orifices, one face of which is bonded to the nozzle forming member, a plurality of piezoelectric elements provided on an face of the channel forming substrate which is opposed to the face bonded to the nozzle forming substrate for causing pressure change to occur in the associated pressure generating chambers, and a reservoir forming member bonded to the face of the channel forming substrate on which the piezoelectric elements are provided, the reservoir forming member having a reservoir section forming at least a part of a reservoir communicated with the pressure generating chambers for supplying ink thereto and a piezoelectric element holding section for defining a space in an area facing the piezoelectric elements such an extent that motion of the respective piezoelectric elements is exhibited while sealing the space hermetically.

Ink jet recording head and ink jet recording apparatus comprising the same

The method for manufacturing an ink jet recording head includes forming an ink pool for supplying ink to a nozzle for jetting ink on a substrate. The method also includes forming, in sequence on the substrate, a diaphragm for pressurizing ink in the ink chamber, a piezoelectric thin film serving as a pressurization source for the diaphragm, and an electrode for the piezoelectric thin film. Patterning of both the piezoelectric thin film and the electrode is done at the same time.

Ink jet recording head and manufacturing method therefor

In a method of making an ink jet recording head, oxide films are formed on both surfaces of a silicon substrate, followed by a first metal film, a piezoelectric film, and a second metal film. A positive resist is formed on the bottom of the substrate, and a first negative resist on the top over the second metal film. The substrate is exposed between two masks. The positive resist is developed first with an alkaline solvent, and then the negative resist is developed with an organic solvent. A second negative resist is formed on top of the substrate before the bottom is etched with the patterned positive resist. The second negative resist is removed afterward, and then the second metal film is etched using the patterned first negative resist.

Method for producing ink-jet recording head

An ink jet print head includes PZT films formed on a first surface of a single-crystal silicon substrate, ink cavities formed in the regions of the single-crystal silicon substrate which correspond in position to the PZT films, and a nozzle plate formed on a second surface of the single-crystal silicon substrate, which is opposite to the first surface. Each ink cavity is formed using anisotropical wet and dry etching, and wherein a portion of each ink cavity close to the first surface of the single-crystal silicon substrate is anisotropically dry etched.

Ink jet print head formed through anisotropic wet and dry etching

An ink-jet recording head includes: a substrate having a first main surface and a second main surface; ink cavity chambers formed on the second main surface of the substrate; and a piezoelectric element device formed on the first main surface of the substrate, the piezoelectric element including a first electrode, a piezoelectric thin film and a second electrode stacked in this order. A material of the first electrode is the same as that of the second electrode in electrochemical potential.

Ink-jet recording head, ink-jet recording apparatus using the same, and method for producing ink-jet recording head

An ink jet recording head includes: a piezoelectric body element,that is formed on a silicon substrate,an ink cavity,that is formed at a location of the silicon substrate,corresponding to the piezoelectric body element,and a jetting port,for jetting ink contained in the ink cavity,The ink cavity,has a beamlike ion implanted layer,that is not only interposed between at least a pair of confronting side walls,and,thereof while coming in contact with desired regions of such side walls,and,but also formed so as to be distanced from other side walls,and,thereof.

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Nagano, Japan

Tsutomu Hashizume