Canon Kabushiki Kaisha

Tsutomi Ikeda

Ryo Kuroda

Kunihiro Sakai

Toshihiko Miyazaki

Katsunori Hatanaka

Haruki Kawada

Akihiko Yamano

Takehiko Kawasaki

Yuji Kasanuki

Masahiro Tagawa

An information processing apparatus includes first, second and third upper electrodes provided on a first substrate, and first, second and third lower electrodes provided on a second substrate opposed to the first, second and third upper electrodes, respectively. Also provided are first, second and third detectors for detecting a first capacitance between the first upper and lower electrodes, a second capacitance between the second upper and lower electrodes and a third capacitance between the third upper and lower electrodes. In addition, the apparatus also includes a first driver for moving the first and second substrates relative to each other in a first direction with respect to the substrate surfaces, a second driver for moving the first and second substrates relative to each other in a second direction perpendicular to the first direction, a third driver for rotating the first and second substrates relative to each other about an axis in a third direction perpendicular to the first and second directions, and a control unit.

Information processing apparatus provided with surface aligning

Growing community of inventors

Hachioji, Japan

Tsutomi Ikeda