Taiwan Semiconductor Manufacturing Comp. Ltd.

Institute for Information Industry

Tsung-Yu Chiang

Kuang-Hsin Chen

Wei-Shuo Ho

Bor-Zen Tien

Tzong-Sheng Chang

Chia-Ming Chang

Chi-Ruei Yeh

Chen Kuang-Hsin

Hsin-Lung Chao

Chen Chu-Hsuan

Chung-Wei Lin

Jyun-Ming Lin

Yi-Ching Huang

Sheng-Chou Lai

Ya-Wen Yang

Cheng-Chien Huang

Horng-Huei Tseng

Chi-Wen Liu

Chia-Chun Liao

Chang-Yin Chen

Chai-Wei Chang

Song-Bor Lee

Lung Chen

Hsin-Hsiang Tseng

Chi-Hsien Liu

Li-Wei Liu

Ying-Hua Lai

Hsin Yang Hung

Li-Ting Chen

Kui-Yu Chen

Chien-Wen Huang

Hsinhsiang Tseng

Wei-Syuan Dai

Semiconductor structure and methods of forming the same are provided. A semiconductor structure according to the present disclosure include a substrate that includes a first region and a second region adjacent the first region, a first fin disposed over the first region, a second fin disposed over the second region, a first source/drain feature disposed over the first fin and a second source/drain feature disposed over the second fin, and an isolation structure disposed between the first fin and the second fin. The isolation structure has a protruding feature rising above the rest of the isolation structure and the protruding feature is disposed between the first fin and the second fin.

Reduction of damages to source/drain features

The present disclosure describes a semiconductor device with a diffusion barrier layer on source/drain (S/D) contact structures and a method of fabricating the semiconductor device. The method of fabricating the semiconductor device includes forming a S/D region on a fin structure, forming a S/D contact structure including a metal on the S/D region, forming a barrier layer including silicon and the metal on the S/D contact structure, and forming a via contact structure on the barrier layer. The barrier layer blocks a diffusion of the metal in the S/D contact structure to the via contact structure.

Barrier layer for contact structures of semiconductor devices

The present disclosure provides a method of manufacturing a semiconductor structure. The method includes providing a substrate; forming a fin structure on the substrate; forming a first dummy gate on the fin structure; forming a trench to penetrate the first dummy gate and the fin structure; forming a dielectric stack in the trench; removing a top portion of the dielectric stack in the trench to leave a lower portion of the dielectric stack in the trench; and forming a protective layer in the trench and directly on the lower portion of the dielectric stack.

Semiconductor structure including isolation structure with dielectric stack and method of forming the same

Various examples of a circuit device that includes gate stacks and gate seals are disclosed herein. In an example, a substrate is received that has a fin extending from the substrate. A placeholder gate is formed on the fin, and first and second gate seals are formed on sides of the placeholder gate. The placeholder gate is selectively removed to form a recess between side surfaces of the first gate seal and the second gate seal. A functional gate is formed within the recess and between the side surfaces of the first gate seal and the second gate seal.

Circuit devices with gate seals

Structures and formation methods of a semiconductor device structure are provided. The method includes forming a first gate structure over a substrate, and the first gate structure includes a first metal electrode. The method includes forming a second gate structure adjacent to the first gate structure, and the second gate structure includes a second metal electrode. The method also includes forming a mask structure covering the first gate structure and exposing the second gate structure, and etching a portion of the second metal electrode of the second gate structure to form an extending conductive portion. The method includes forming a metal layer over the first gate structure and the extending conductive portion, and etching the metal layer, such that no metal layer is remaining over the first gate structure, and a remaining portion of the metal layer is over the extending conductive portion.

Method of forming semiconductor device structure with gate structure

A method includes forming an n-type Fin-Field Effect Transistor (FinFET) and a p-type FinFET. The forming of the n-type FinFFT includes: forming a first auxiliary gate stack over a first semiconductor fin; forming an n-type source/drain region on the first semiconductor fin adjacent to the first auxiliary gate stack; and performing a first etch to form a first recess with a first depth on a first top surface of the n-type source/drain region. The forming of the p-type FinFFT includes: forming a second auxiliary gate stack over a second semiconductor fin; forming a p-type source/drain region on the second semiconductor fin adjacent to the second auxiliary gate stack; and performing a second etch to form a second recess with a second depth on a second top surface of the p-type source/drain region. The first depth is greater than the second depth.

Semiconductor structure and method of forming the same

A method for forming a semiconductor device structure is provided. The method includes forming a first gate stack and a second gate stack over a semiconductor substrate and forming a dielectric layer over the semiconductor substrate to surround the first gate stack and the second gate stack. The method also includes forming a protection element to cover the second gate stack. The method further includes replacing the first gate stack with a metal gate stack after the formation of the protection element.

Formation method of semiconductor device structure with gate stacks

A semiconductor device includes a gate structure disposed in a first dielectric layer, a conductive segment disposed in the first dielectric layer and separated from the gate structure, a second dielectric layer disposed over the first dielectric layer, a first contact penetrating the second dielectric layer and electrically connected to the gate structure, a second contact penetrating the second dielectric layer and electrically connected to the conductive segment, and a silicon nitride-based layer surrounding at least one of the first and second contacts and connected between the second dielectric layer and the at least one of the first and second contacts. A method for making the semiconductor device is also provided.

Semiconductor device and method for making the same

Structures and formation methods of a semiconductor device structure are provided. The method includes forming a first metal gate structure in a first dielectric layer. The method includes forming a second metal gate structure in the first dielectric layer, and the second metal gate structure includes a second metal electrode over a second gate dielectric layer. The method also includes forming a mask structure covering the first metal gate structure. The method includes etching a portion of the second gate dielectric layer and a portion of the second metal electrode of the second metal gate structure to form a first conductive portion extending above a top surface of the second gate dielectric layer. The method includes forming a metal layer over the first conductive portion, and the metal layer has a recess, and a top portion of the first conductive portion extends into the recess.

Structure and formation method of semiconductor device structure with gate structure

Among other things, one or semiconductor arrangements, and techniques for forming such semiconductor arrangements are provided. An etch sequence is performed to form a first etched region over a planar region of a semiconductor arrangement. The first etched region exposes a planar structure, such as an alignment mark used for alignment during semiconductor fabrication. The etch sequence forms a second etched region over a semiconductor fin region of the semiconductor arrangement. In an embodiment, the etch sequence forms a first trench, a first fin nub and a first pillar in the semiconductor fin region, where the first trench is formed in a semiconductor substrate of the semiconductor fin region. A multi-depth STI structure is formed over at least one of the first trench, the first fin nub, or the first pillar.

Semiconductor arrangement with fin features having different heights

A semiconductor device includes a FinFET component, a plurality of patterned dummy semiconductor fins arranged aside a plurality of fins of the FinFET component, an isolation structure formed on the patterned dummy semiconductor fins, and a tuning component formed on the patterned dummy semiconductor fins and electrically connected to the FinFET component. A height of the patterned dummy semiconductor fins is shorter than that of the fins of the FinFET component.

Semiconductor device and fabricating method thereof

Among other things, one or more semiconductor arrangements, and techniques for forming such semiconductor arrangements are provided. A layer, such as a poly layer or an inter layer dielectric (ILD) layer, is formed over a substrate. A photoresist mask is formed over the layer. The photoresist mask comprises an open region overlaying a target region of the layer and comprises a protection region overlaying a second region of the layer. An etching process is performed through the open region to reduce a height of the layer in the target region in relation to a height of the layer in the second region because the protection region inhibits the etching process from affecting the layer in the second region. A first structure, having a first height, is formed within the target region. A second structure, having a second height greater than the first height, is formed within the second region.

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Taipei, Taiwan

Tsung-Yu Chiang