Taiwan Semiconductor Manufacturing Comp. Ltd.

TSMC Nanjing Company, Limited

Tsung Tso Tsai

Chian-Niang Lin

Barry Tsao

A method includes receiving, in a first vessel, a flow of fluid from a second vessel, wherein the flow of fluid is generated by pressurizing a head space over the fluid in the second vessel; capturing the flow of fluid from the second vessel at an upper end of a de-bubbling slide in the first vessel; and directing the flow of fluid along a flow surface of de-bubbling slide to a lower portion of the first vessel, such that bubbles and dissolved gases in the fluid exit the fluid on the flow surface of the de-bubbling slide.

Method of bubble removal from viscous fluid

A de-bubbling slide is configured to fit in a dispensing vessel and capture, with a receiving element, a flow of fluid into the dispensing vessel from a fluid inlet. The receiving element of the de-bubbling slide directs the flow of fluid to a flow surface of the de-bubbling slide from which gas dissolved in the flow of fluid, or bubbles in the flow of fluid, escape from the fluid. Openings in an upper surface of the de-bubbling slide allow the escaped gas to exit the de-bubbling slide.

Growing community of inventors

Nanjing, China

Tsung Tso Tsai