Taiwan Semiconductor Manufacturing Comp. Ltd.

Global Unichip Corporation

Tsung-Ju Hsieh

Chang-Ming Liu

Shih-Hua Hsu

Chien-Hao Lin

Teng-Hui Lee

Pi-Tsan Lo

A brightness calibration method used in an optical detection system includes a single source illuminator and a probe card. The single source illuminator is configured to illuminate the probe card. The probe card has a plurality of detection sites. The brightness calibration method includes: sequentially detecting brightness values at the detection sites through one of a plurality of diffusers by a sensing chip; sequentially detecting transparencies of the diffusers at one of the detection sites by the sensing chip; and selecting and respectively disposing the diffusers corresponding to larger ones of the transparencies over the detection sites corresponding to smaller ones of the brightness values, and selecting and respectively disposing the diffusers corresponding to smaller ones of the transparencies over the detection sites corresponding to larger ones of the brightness values.

Brightness calibration method used in optical detection system with a plurality of diffusers

An optical inspection fixture includes a first bracket, a second bracket and at least one loading surface. The first bracket is provided with at least one first arm. The second bracket and the first bracket are separated from each other so as to define a light traveling path that lights can go through. The second bracket is provided with at least one second arm which is separated from the first arm. The loading surface is between the first bracket and the second bracket, and connected to at least one of the first arm and the second arm, and the loading surface is used to carry an optical conversion element.

Optical inspection device and optical inspection fixture thereof

Growing community of inventors

Hsinchu County, Taiwan

Tsung-Ju Hsieh