Taiwan Semiconductor Manufacturing Comp. Ltd.

Tsung-Jen Yang

Cheng-Yi Huang

Ching-Hou Su

Chih-Pin Wang

Chao-Li Shih

Yi-Zhen Chen

Hong-Hsing Chou

Cheng-Chieh Chen

In an embodiment, a magnetic assembly includes: an inner permeance annulus; and an outer permeance annulus connected to the inner permeance annulus via magnets, wherein the outer permeance annulus comprises a peak region with a thickness greater than other regions of the outer permeance annulus.

Permeance magnetic assembly

A system for semiconductor manufacturing that uses ultrasonic waves for estimating and monitoring a remaining service lifetime of a consumable element is provided. A consumable element comprises a front side arranged inside a process chamber and a back side, opposite the front side, arranged outside the process chamber. An ultrasonic transducer is arranged on the back side of the consumable element, and directed towards the front side of the consumable element. A monitoring unit is configured to estimate and monitor a remaining service lifetime of the consumable element using the ultrasonic transducer. A method for estimating and monitoring the remaining service lifetime of the consumable element using ultrasonic waves is also provided.

Method for monitoring usage of a physical vapor deposition (PVD) target with an ultrasonic transducer

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Hsinchu, Taiwan

Tsung-Jen Yang