Taiwan Semiconductor Manufacturing Comp. Ltd.

National Taiwan University

Tsung-Chin Cheng

Samuel C Pan

Chih-I Wu

Shang-Yi Liu

A method and structure for providing high-quality transferred graphene layers for subsequent device fabrication includes transferring graphene onto a hydrophobic surface of a hydrophobic layer and performing a thermal treatment process. In various embodiments, a substrate including an insulating layer is provided, and a hydrophobic layer is formed over the insulating layer. In some examples, a graphene layer is transferred onto the hydrophobic layer. By way of example, the transferred graphene layer has a first carrier mobility. In some embodiments, after transferring the graphene layer, an annealing process is performed, and the annealed graphene layer has a second carrier mobility greater than the first carrier mobility.

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Taoyuan, Taiwan

Tsung-Chin Cheng