Taiwan Semiconductor Manufacturing Comp. Ltd.

Tsung-chieh Tsai

Bao-Ru Young

Ming Chyi Liu

Chien-Chih Chou

Yu-Chang Jong

Yen-Sen Wang

Jhih-Bin Chen

Hung-Shu Huang

Jhe-Ching Lu

Jhu-Min Song

Yu-Lun Lu

Yi-Kai Ciou

A semiconductor structure and forming method thereof are provided. A substrate includes a first region, a second region, and a boundary region defined between the first region and the second region. An isolation structure is disposed in the boundary region. An upper surface of the isolation structure has a stepped profile. A first boundary dielectric layer and a second boundary dielectric layer are disposed over the isolation structure. The first boundary dielectric layer is substantially conformal with respect to the stepped profile of the isolation structure.

Semiconductor structure and forming method thereof

Semiconductor device and the manufacturing method thereof are disclosed. An exemplary method comprises forming a first semiconductor layer including a first semiconductor material in a first area of a substrate; alternately depositing second semiconductor layers and third semiconductor layers over the first semiconductor layer and over the substrate to form a semiconductor layer stack, wherein the second semiconductor layers include a second semiconductor material, the third semiconductor layers include the first semiconductor material, the second semiconductor material is different from the first semiconductor material, and a bottom surface of one of the second semiconductor layers contacts the first semiconductor layer in the first area and contacts the substrate in a second area of the substrate; planarizing a top surface of the semiconductor layer stack; and patterning the semiconductor layer stack to form a first semiconductor structure in the first area and a second semiconductor structure in the second area.

Gate-all-around device with different channel semiconductor materials and method of forming the same

Growing community of inventors

HSIN-CHU COUNTY, Taiwan

Tsung-chieh Tsai