Other

Mitsubishi Electric Corporation

Ulvac Coating Corporation

Mitsubishi Electric Company

Ulcoat (ulvac Coating Corporation)

Tsuneo Yamamoto

Nobuyuki Yoshioka

Akihiko Isao

Susumu Kawada

Junji Miyazaki

Ryoichi Kobayashi

Atsushi Hayashi

Akira Chiba

Jun Amano

Yoshihiro Saito

A uniform thin phase-shifting photomask blank can be formed by depositing a thin film on a substrate by a reactive sputtering technique while passing, at least four times, the substrate over a sputtering target. In the formation of the blank, NO gas is used as the reactive gas, a target composed of a mixture of molybdenum and silicon is used as the sputtering target and a transparent substrate is used as the thin film-forming substrate to form, on the transparent substrate, a light-transmitting film capable of transmitting light rays having an intensity, which cannot substantially contribute to the exposure. In addition, the film is formed, on the substrate, through an opening having a sufficiently enlarged length along the substrate-conveying direction so that even regions whose deposition rate of the target component is not more than 90% of the maximum level thereof also contribute to the film-formation. The phase-shifting photomask blank thus prepared is subjected to a patterning treatment to form a phase-shifting photomask.

Phase-shifting photomask blank, phase-shifting photomask, method for producing them and apparatus for manufacturing the blank

A phase-shifting photomask blank is made by sputtering a target of molybdenum suicide with a sputtering gas to which nitric monoxide is added in a ratio of 2.65-6.47% by volume. A nitrided-oxide film of molybdenum silicide as a phase-shifting film is formed on a transparent substrate. A base phase-shifting film may be formed on a transparent substrate and then a nitrided-oxide film of molybdenum silicide as a surface layer may be formed on top of the base phase-shifting film by sputtering a target of molybdenum silicide with a sputtering gas to which nitric monoxide is added in a ratio of 0.59-6.47% by volume. The transparent substrate on which the nitrided-oxide film of molybdenum slicide is formed may be subjected to a heat treatment at a temperature of 200.degree. C. or more.

Phase-shifting photomask blank and method of manufacturing the same as

A phase-shifting photomask blank is made by sputtering a target of molybdenum silicide with a sputtering gas to which nitric monoxide is added in a ratio of 2.65-6.47% by volume. A nitrided-oxide film of molybdenum silicide as a phase-shifting film is formed on a transparent substrate. A base phase-shifting film may be formed on a transparent substrate and then a nitrided-oxide film of molybdenum silicide as a surface layer may be formed on top of the base phase-shifting film by sputtering a target of molybdenum silicide with a sputtering gas to which nitric monoxide is added in a ratio of 0.59-6.47% by volume. The transparent substrate on which the nitrided-oxide film of molybdenum slicide is formed may be subjected to a heat treatment at a temperature of 200.degree. C. or more.

Method of manufacturing phase-shifting photomask blank

In a collapsible bed structure for bed-ridden invalids, a bed section is provided on an upper open end of a bathtub, the bed section having at least first, second and third bed plates each pivotably connected at their neighboring side. A link structure is provided to change the bed section between a rest position in which the first, second and third bed plates are horizontally supported and an operative position in which the first, second and third bed plates are supported in a chair-shaped configuration within the bathtub. A pedestal plate is pivotably placed at one end by a hinge to the first plate of the bed section, the pedestal plate having a rack operative to move the pedestal plate upward around the hinge so as to raise the haunches of an occupant lying on the bed section to expedite the occupant's divestiture. A slide plate is slidably mounted on each of the first and second bed plates of the bed section to slightly slide along a lengthwise direction of the occupant so as to prevent a slippage between the occupant lying on the bed section and the first and second bed plates when changing the bed section from the rest position to the operative position.

Collapsible bed structure for bed-ridden invalids

Growing community of inventors

Saitama-ken, Japan

Tsuneo Yamamoto