Canon Kabushiki Kaisha

Tsuneo Takashima

Yoshikazu Miyajima

Yukio Takabayashi

Naoya Kaneda

Hiroyuki Wada

Shigeru Ogino

Youichi Iwasaki

Yukio Yamane

Yoshiki Kino

Harunobu Ichinose

Kazuya Matsuda

A stage apparatus includes a guide provided with a surface including a magnetic body, a moving body movable along the surface, a gas bearing for supporting the moving body with respect to the surface, and a magnet which is supplied to the moving body and produces a magnetic attractive force with the magnetic body. The surface of the guide has edges to define its size in a width direction, which is orthogonal to a traveling direction of the moving body to limit movement of the moving body in the width direction, using a magnetic attractive force of the magnet in a direction parallel to the surface, and to apply pre-pressure to the gas bearing.

Bearing assembly, stage device using same, and exposure apparatus using same

A stage base includes a magnetic body and has a slider guide surface defined by a groove. A portion of the slider that opposes the guide surface is provided with an air pad, whereby a hydrostatic bearing is formed. The slider is further provided with a pressurizing magnet for applying a magnetic attractive force between itself and the guide surface in a direction perpendicular to the guide surface. Displacement of the slider in a direction orthogonal to the travelling direction thereof is limited to a predetermined range using a magnetic attractive force, which is parallel to the guide surface, produced when at least a part of the pressurizing magnet deviates from the guide surface.

Disclosed is a positioning system effective to cancel a moment reaction force, and it includes a movable portion and a reaction force absorbing mechanism for absorbing a propulsion reaction force to be produced by motion of the movable portion. A first distance between a reference plane and a gravity center position of the movable portion, being supported for movement along the reference plane, and a second distance between the reference plane and a gravity center position of the reaction force absorbing mechanism are made substantially equal to each other, and/or the second distance and a third distance between the reference plane and a motor movable element for propelling the movable portion along the reference plane are made substantially equal to each other.

Positioning system and exposure apparatus having the same

A stage device includes a movable body, movable along a guide surface, for moving an element mounted on the movable body, a static pressure bearing, having at least one pad, for guiding the movable body along the guide surface, the at least one pad being attached to the movable body at a first position, and a linear motor, having a movable part and a relatively stationary part, for moving the movable body, the movable part of the linear motor being attached to the movable body at a second position. The movable body has a hollow structure at at least one of the first position and the second position. The hollow structure has an enclosure structure or a rib structure.

Stage device, an exposure apparatus and a device manufacturing method using the same

A positioning system includes an X-Y table having a substrate holding surface for holding a substrate, the holding surface being movable in directions of X and Y axes, respectively, relative to a base table, a rotational table being rotationally movable about each of the X and Y axes and also being movable in a direction of a Z axis which is perpendicular to both of the X and Y axes, a controller for driving controlling the X-Y table and the rotational table and a storage device for storing, beforehand, information regarding rotation about the X or Y axis to be caused during motion of the X-Y table. The controller actuates the rotational table on the basis of the information stored in the storage device to correct rotation about the X or Y axis caused during motion of the X-Y table.

Positioning system

The present invention relates to an optical instrument such as an optical axis deflecting device or an image stabilizing device having an optical member supported for rotation about a predetermined axis and rotated about the predetermined axis to thereby deflect the optical axis of passing light, moving means adapted to move in a direction along a plane inclined by a predetermined angle from a plane perpendicular to the predetermined axis to thereby rotate the optical member about the predetermined axis, and driving means for driving the moving means. With such construction, a driving force generated by the driving means acts on that portion of the optical member which is far from the rotational shaft thereof and as a result, a driving torque for driving the optical member can be enhanced without causing the bulkiness and higher cost of the device and an increase in consumed electric power.

Image stabilizing device

A camera having camera movement detection includes a movement detection circuit for detecting the movement of the camera and a blur correction circuit for correcting the blur of a picture image due to the movement of the camera on the basis of the output of the movement detection circuit. A control circuit controls the power supply of the camera on the basis of the output of the movement detection circuit and turns off the power supply of the blur correction circuit in a case where the camera is fixed.

Camera apparatus having camera movement detection

An optical apparatus comprising blur suppressing devices for suppressing blurs in a plurality of directions, a controlling device for conducting a drive control of the blur suppressing devices for suppressing the blurs in the plurality of directions, and a drive control switching device for switching in time division the drive control conducted by the control device to suppress the blurs in the plurality of directions. The vibrations in a plurality of directions may be pitching and yawing of the apparatus. The optical apparatus may further comprises drive devices for driving the respective blur suppressing devices, and vibration detecting devices for detecting the respective vibrations in a plurality of directions.

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Tochigi, Japan

Tsuneo Takashima