Smc Corporation

Other

Tsuneo Ishigaki

Hiromi Shimoda

Hiroshi Ogawa

Kenji Waragai

Takashi Nagao

Ikuo Kanzaka

Yasuyuki Nishimura

Seiichi Furutate

Kazumasa Nishida

Mamoru Fukuda

Hiroshi Komuro

Keiichi Shibuya

To provide a gate valve such that two connected surfaces perpendicular to each other of a valve plate housing frame can be connected to two side walls perpendicular to each other of a chamber in such a manner that the connected surfaces are in contact with the side surfaces. When screwing a fixation screw perpendicularly into a screw hole formed in one chamber wall of a chamber through a screw insertion hole formed in one frame wall of a valve plate housing frame of a gate valve, and tightening the fixation screw to press and fix the frame wall against and to the first chamber wall, a thrust force in a direction perpendicular to the axis of the fixation screw is generated in the valve plate housing frame by a cam mechanism formed on the fixation screw and in the screw insertion hole, and the other frame wall of the valve plate housing frame is pressed against and fixed to the other chamber wall of the chamber by the thrust force.

Gate valve

In a valve box that makes up a gate valve, a balance room is disposed on one side wall that faces toward a processing chamber. In the balance room, a first seal member is provided to surround a first pathway, and a second seal member is mounted on an outer edge of the balance room. Further, a balance port is formed in the balance room. The balance port communicates with an accommodating room that is formed in the interior of the valve box. In a valve closed state in which a valve disk is seated on a valve seat of the valve box, the pressure inside the accommodating room and the pressure inside the balance room are equalized or made uniform through the balance port.

A gate valve that can suppress the deterioration of a seal member due to radicals is provided, and the seal member in the gate valve can be prevented from coming off a dovetail groove. A seal groove for attaching a seal member is formed by a first groove portion that has a rectangular cross-section and a second groove portion that is provided in the bottom wall of the first groove portion and that has a dovetail groove-like cross-section. The seal member is held in the second groove portion with part thereof protruded into the first groove portion. A valve seat that is inserted into and pulled out of the seal groove to be brought into and out of contact with the seal member is protruded from the inner surface of a partition wall in which a gate opening is provided.

Radical-resistant gate valve

A parallel movement mechanism including guide grooves and guide rollers and a perpendicular movement mechanism including cam grooves and cam rollers are interposed between a drive rod of an air cylinder and a valve assembly. By moving the valve assembly parallel to valve seat surfaces formed around a pair of openings of a valve casing with the parallel movement mechanism, and then moving it perpendicularly to the valve seat surfaces with the perpendicular movement mechanism, valve seal members of valve elements can be brought into and out of contact with the valve seat surfaces, and the openings can be selectively opened and closed.

Non-sliding gate valve

A parallel movement mechanism including guide grooves and guide rollers and a vertical movement mechanism including cam grooves and cam rollers are interposed between a drive rod and a valve shaft of an air cylinder, and a valve seal of a valve plate is moved vertically toward and away from a valve seat surface to open and close the opening by moving the valve shaft in parallel to the valve seat surface by the parallel movement mechanism and moving the same vertically with respect to the valve seat surface by the vertical movement mechanism.

A cartridge heater is accommodated in a heater bore in a shaft connected to a valve element, and a heating portion provided at an end portion of the cartridge heater is located at a joint portion of the shaft and the valve element. At the joint portion, a heat receiving groove and a pressurizing portion communicating with the heater bore are provided at a position between a surface of the valve element and that of the shaft located so as to oppose and to contact each other. The heat receiving groove includes an arcuate groove portion of the same radius as that of the heating portion of the cartridge heater, and the heating portion is pressed by the pressurizing portion to enter into plane-to-plane contact with an inner circumferential surface of the arcuate groove portion of the heat receiving groove, upon fastening the valve element and the shaft to each other with a bolt, with the heating portion located between the heat receiving groove and the pressurizing portion.

Vacuum valve

A gate valve includes a valve plate for opening and closing a gas passageway, and an air cylinder and a shaft for linearly moving the valve plate between a main housing portion and a storage housing portion of a housing, and the air cylinder is arranged on the first lateral surface side of the housing in parallel with a moving direction of the valve plate, and the shaft is arranged so as to overlap with the valve plate in parallel with the moving direction. A tip end of the shaft is coupled with the valve plate at a position situated near a front end portion in the moving direction thereof.

Linear motion-type gate valve

In a vacuum valve composed of a main valve portion that opens and closes a vale seat in a flow path connecting two ports by a valve member, and an operating portion that performs an opening and closing operation for the valve member, the housing of the main valve portion is assembled by joining the two port members with a cylindrically shaped housing main body formed by a squeezing process for a plate material made of metal, or a ring-shaped material made of the metal. In an end portion of the housing, a flange-shaped attaching portion that is bent inward is formed. The operating portion is attached onto the attaching portion via a ring-shaped supporting seat member. A sealing member is sandwiched between a ring-shaped supporting plate and the attaching portion. Both ends of a bellows are respectively connected to the supporting plate and the valve member.

A gate valve has a transfer chamber-side valve element and a process chamber-side valve element connected to a single shaft. A rotary latch pivotably supported on an inner surface of one of the valve element with the rotary latch having a latch surface at a forward end thereof, wherein when a rotational force is applied to the rotary latch in one direction, the latch surface is pressed against a joint surface of the single shaft, whereby the valve element is latched to said single shaft, and when a rotational force is applied to the rotary latch in the opposite direction, the latch surface is separated from the joint surface of the single shaft to unlatch the valve element.

A gate valve has a transfer chamber-side valve element and a process chamber-side valve element connected to a single shaft actuated with a single three-position air cylinder to selectively close a process chamber opening and a transfer chamber opening or fully open both the openings to allow an object to pass therethrough. A lever member is secured to the single shaft. A roller supported by the lever member is kept in engagement with a cam groove of a cam member. A cam support member for supporting the cam member is connected to the piston rod of the three-position air cylinder. A spring is interposed between the lever member and the cam support member. When the piston rod is in the first (lower extremity) position, both the transfer chamber-side valve element and the process chamber-side valve element fully open the transfer chamber opening and the process chamber opening, respectively. As the piston rod shifts from the first position to the second position, the roller shifts from engagement with an upper position of the cam groove to engagement with an intermediate position, causing the process chamber-side valve element to close the process chamber opening. As the piston rod shifts from the second position to the third (upper extremity) position, the roller shifts from the engagement with the intermediate position to engagement with a lower position of the cam groove, causing the transfer chamber-side valve element to close the transfer chamber opening.

A gate valve apparatus minimizes the chance that radicals and plasma in exhaust gas will contact a main valve seal, thereby preventing deterioration of the main valve seal. Slats of a flow control device are installed in an exhaust flow path to control the pressure in a process chamber. The main valve seal is provided on an abutting surface of a main valve element. An annular projection is provided on a pump-side inner wall surface of an accommodating chamber. When it is in a non-sealing position, the main valve element is moved toward the pump-side inner wall surface of the accommodating chamber to bring an outer peripheral portion of the main valve element into contact with the annular projection. Thus, the main valve seal is shielded from radicals and plasma in exhaust gas by the main valve element, the annular projection and the pump-side inner wall surface of the accommodating chamber. A shielding ring may be secured to an outer peripheral portion of the main valve element radially outward of the main valve seal instead of using the annular projection.

Gate valve apparatus

In a gate valve having a rectangular gate, generation of flection at opposite end portions due to bending moment applied to the gate is suppressed easily. For this purpose, in the gate valve in which a central portion of a longer side of the rectangular gate is mounted to a tip end of a shaft operated by driving of a cylinder device and the gate is pressed against a valve seat provided around a rectangular valve opening by tilting the shaft after the gate is moved to a position facing the valve opening by movement of the shaft by driving of the cylinder device, the gate is formed to have an uneven wall thickness including a large thickness in a vicinity of a fulcrum portion connected to the shaft and a small thickness on each of opposite end portion sides.

A ring-shaped low load seal attached into a ring-shaped dovetail groove having an opening portion, a first side wall face, a second side wall face, and a bottom wall face. This seal has a trileaf cross-sectional configuration composed of a first arc portion, a second arc portion, a protruding portion, and a concave portion disposed between the first arc portion and the second arc portion.

Low load seal

A gate for opening and closing an opening of a chamber is fixed to a top end of an arm swung between a position facing the opening and a retreating position on the side thereof. A base end of the arm is supported by an output shaft of a fluid pressure cylinder driven in parallel with a direction in which the gate comes into contact with and is separated from the opening and a cam follower fit in a guide groove of a machine frame is provided at the base end of the arm The guide groove is formed by an axial-direction groove for carrying the gate at the position facing the opening and then moving it when the gate is located at a position in the vicinity of the opening of the chamber and a slant-periphery direction groove connected thereto for retreating the gate to the side of the opening.

Swing-door gate valve

A high-vacuum valve arranged to prevent conduction of heat from a valve element to a low-temperature part through a valve shaft. After the valve element has been moved to a position facing opposite to a valve seat by rectilinear motion of the valve shaft, the valve element is pressed against the valve seat to close the valve by pivotal motion of the valve shaft. A heater is provided in the valve shaft in close contact with it. Wiring is connected to the heater to supply it with electric power from outside the high-vacuum valve.

Growing community of inventors

Kitakatsushika-gun, Japan

Tsuneo Ishigaki