Samsung Display Co., Ltd.

Tsunemitsu Torigoe

Chang Hoon Kim

Sang Hyun Lee

Hi-Kuk Lee

Chang-Hoon Kim

Su-Yeon Sim

Hi Kuk Lee

Ki Beom Lee

Kab Jong Seo

Kab-Jong Seo

Hong Suk Yoo

In an aspect, a grating light valve module including: a substrate; and a plurality of ribbons disposed on the substrate, wherein each of the ribbons includes an insulating layer, a conductive layer disposed on the insulating layer, and an anti-oxidation layer disposed on the conductive layer is provided.

Maskless exposure device

The present invention relates to a method of controlling a light exposure apparatus including an exposure beam generator equipped with a prism or a bend mirror and a vacuum chamber through which light generated in the exposure beam generator passes. The method includes, generating an exposure beam; measuring a deviation of a center of the exposure beam from a reference line in the vacuum chamber; and adjusting the prism or the bend mirror in the exposure beam generator to adjust the center of the exposure beam when the center of the exposure beam is misaligned with the reference line.

Light exposure apparatus and method of controlling the same

A light exposer according to an embodiment of the present invention includes an exposure beam generator generating an exposure beam, and a vacuum chamber passing the exposure beam generated by the exposure beam generator and including a first fly eye lens having a plurality of convex lens like fly eyes. The exposure beam generator includes an oscillator including an oscillator pumping chamber, a first prism and a second prism, and a first exposure beam diameter changing lens positioned before the first prism and enlarging a diameter of the exposure beam.

Exposure apparatus and method of configuring exposure apparatus

An exposure apparatus includes an irradiating part which irradiates light, a light blocking member including a light condensing part at a side of the light blocking member, where the light condensing part condenses the light, a mask which is spaced apart from the light blocking member by a first distance, and a transporting part which transports a target substrate in a first direction.

Exposure apparatus including light blocking member with light condensing part

Growing community of inventors

Hwaseong-si, South Korea

Tsunemitsu Torigoe