Daikin Industries, Ltd.

Tsunemasa Funatsu

Takashi Tanaka

Ryutaro Ohashi

Toshitaka Takei

Hajime Iida

Hisashi Hasegawa

Toshiyuki Mase

Masao Miyoshi

Tami Nakanishi

A resist developing apparatus comprising a developing tank consisting of a top portion, a body portion, and a bottom portion, at least one of the top, body, and bottom portions being comprised of an inner wall and an outer wall, a heat exchange chamber being defined between the inner and outer walls for being supplied with a heating medium; a chuck disposed inside the developing tank for holding a work piece in position, a nozzle for spraying chemical liquid toward the work piece held in position by the chuck; a heating medium supply unit for supplying heating medium at a specified temperature to the heat exchange chamber; and piping connecting between the heating medium supply unit and the heat exchange chamber, whereby the interior of the developing tank is adapted to be controlled to a specified temperature.

Resist developing apparatus

A ice making machine having a plurality of novel ice making plates or more preferably cylindrical ice making plates, which is formed to be longitudinal cell type wherein said ice making plates proper can be integrally fabricated by extrusion or drawing of heat conductive material, to have a means of fixing cooling tubing thereto by expanding, to be constructed said ice making plates proper and distance pieces made of heat insulating material being piled up alternately upon each other, to be constructed said cooling tubing being fixed thereto by expanding and thus to be assembled ice making plates having a predetermined size and number of ice cube making chambers therein.

Ice making machine and method of manufacture thereof

Growing community of inventors

Sakai, Japan

Tsunemasa Funatsu