Shimadzu Corporation

Tsunehiro Inoue

Takahiro Mori

Hiroomi Goto

Hirohisa Abe

Akira Arakawa

Tomoo Ota

Masatsugu Takemoto

Yu Fu

A rotation mechanism () of a vacuum pump () includes a magnetic bearing unit () having a first outer diameter (), the magnetic bearing unit () being operable as a first radial magnetic bearing (), and a motor unit () provided on a side of a second end () of a rotary shaft () relative to the magnetic bearing unit, the motor unit () having a second outer diameter () larger than the first outer diameter, the motor unit () being operable as both a motor () and a second radial magnetic bearing ().

Vacuum pump including magnetic bearing and motor bearing operable as radial magnetic bearing, motor, and thrust magnetic bearing

A vacuum pump () includes a rotor (), a rotor blade (), and a magnetic-bearing-integrated stator () including a coil. The rotor includes a pair of spacer members (), a support member (), a permanent magnet (), and a protective ring (), and in an axial direction of a rotary shaft (), the support member has a mechanical strength higher than that of the protective ring.

Vacuum pump and magnetic-bearing-integrated motor

A feedback control apparatus includes: a detector configured to detect an output value based on a controlled object; a P control circuit including a differential amplifier circuit and an analog circuit, the differential amplifier circuit being configured to receive a detection value of the detector and a target value, the analog circuit being configured to output a P control component Vto an output of the differential amplifier circuit; an I control unit configured to output an I control component Vby integrating a deviation of the detection value from the target value by digital processing; and a driver element configured to be driven based on the P control component Vfrom the P control circuit and the I control component Vfrom the I control unit to control the controlled object.

Feedback control apparatus

A pressure control valve includes a pressure control block including a bore hole that is bored perpendicularly from one outer surface, and two internal channel openings of whose end portions are at a bottom surface of the bore hole, a valve body having elasticity and covering the bottom surface of the bore hole, a sealing member for pressing a portion of the valve body against the bottom surface of the bore hole, the portion abutting a peripheral edge portion of a portion of the bottom surface where the openings are provided, and an actuator for driving a portion, of the valve body, abutting the portion where the openings are provided in a direction perpendicular to the bottom surface of the bore hole.

Pressure control valve and supercritical fluid chromatograph

A supercritical fluid chromatograph includes a supercritical flow path, a mobile phase supply section for supplying a mobile phase containing liquid carbon dioxide, a sample introduction section, a sample separation section, a detector, and a pressure control valve. A valve post-stage flow path is connected to a fluid outlet of the pressure control valve, and the inside of the valve post-stage flow path is maintained by pressure maintaining means at a pressure by which a mobile phase from the fluid outlet of the pressure control valve is not vaporized.

Supercritical fluid processing device

The present invention provides a particle counter capable of accurately discriminating the signal of scattered light by real particles from the background light noise, and furthermore, capable of detecting smaller particles than conventional particle counters. The particle counter according to the present invention includes: a light irradiator for emitting light to the measurement areain a vacuum state or in a near vacuum state; a scattered light detectorfor detecting scattered light generated when the light is delivered to the measurement area; a discriminatorfor determining whether or not a particle exists in the measurement areaby comparing the detection signal of the scattered light detectorand a predetermined discrimination threshold; a vacuum gaugefor measuring the pressure of the measurement area; and the threshold setting unitfor setting a discrimination threshold in accordance with the pressure of the measurement area

Particle counter

The present invention provides a particle counter capable of sensitively determining the contamination level of a light transmission window. The particle counter according to the present invention includes: a light sourcefor emitting light through a light incident windowto a measurement areain a vacuum state or in an approximately vacuum state; a scattered light detectorfor detecting scattered light through a detection window, the scattered light being generated when a light is delivered to the measurement area; a vacuum gaugefor measuring the pressure of the measurement area; a signal processorfor converting a detection signal of the scattered light into an electrical signal; and a contamination level determinerfor determining the contamination level of the transmission window from the time average of the electrical signal and the pressure.

Growing community of inventors

Kyoto, Japan

Tsunehiro Inoue