Ngk Insulators, Inc.

Corning Incorporated

Tsuneaki Ohashi

Yuji Katsuda

Kiyoshi Araki

Keiichiro Watanabe

Tomoyuki Fujii

Hirotake Yamada

Takashi Harada

Sadanori Shimura

Fumio Abe

Nobuo Tsuno

Keiji Matsuhiro

Hiroshige Mizuno

Hiroshi Furukubo

Masaaki Masuda

Sugio Miyazawa

Kunihiko Yoshioka

Tadaaki Matsuhisa

Hiromichi Kobayashi

Makoto Murai

Kazuhi Matsumoto

Toshio Oda

Toshiichi Ikami

Mitsuru Ohta

Masakatsu Inoue

Shinji Kawasaki

Raja Rao Wusirika

Katsuhiro Inoue

Shigenori Ito

Yasufumi Aihara

Kevin Robert Brundage

Srinivas H Swaroop

Hisanori Yamamoto

David S Weiss

Teruhisa Kurokawa

David F Thompson

Hiroyuki Iwasaki

Nobuyuki Tanahashi

Tsutomu Imai

Yoshihiro Fujiwara

Masashi Harada

Hiroyuke Iwasaki

A first inorganic powder molded body and a second inorganic powder molded body are obtained. Each of the bodies contains an inorganic powder, an organic dispersion medium having a reactive functional group and a gelling agent and is solidified by chemical reaction of the organic dispersion medium and the gelling agent. Slurry containing a powder component and an organic dispersion medium is applied to a joint surface of the first inorganic powder molded body. The inorganic powder molded bodies are allowed to abut on each other while interposing the slurry therebetween, and integrated together into a joined body. A sintered body is obtained by sintering the joined body.

Method for producing sintered body, and sintered body

The present invention relates to a ceramic tube for a high-intensity discharge lamp, comprising a hollow member and a plug member. The hollow member contains a substantially cylindrical body and a closure for closing one end of the body, and the plug member is inserted into an insertion opening formed at the other end of the body. Before the insertion of the plug member, the insertion opening has a tapered portion with a diameter decreasing in the direction from the open end to the inside at least in an area into which the plug member is inserted. After the insertion of the plug member, an outer wall of the plug member is bonded to an inner wall of the insertion opening.

Ceramic tube for high-intensity discharge lamp and method of producing the same

A translucent polycrystalline sintered body is mainly composed of an alumina, is suitable for the manufacture of an arc tube for a high-intensity discharge lamp, and has an average grain diameter of 35 to 70 &#x3bc;m, preferably 50 to 60 &#x3bc;m. In a case where the sintered body is in a 0.5-mm-thick flat plate shape, the in-line transmittance of the sintered body is 30% or more, preferably 50% or more. In this case, the ratio between maximum and minimum in-line transmittance values is 2:1 to 1:1 in the visible region of 360 to 830 nm. The bending strength of the sintered body is 250 MPa or more, preferably 300 MPa or more.

Translucent polycrystalline sintered body, method for producing the same, and arc tube for high-intensity discharge lamp

A mold includes a gate communicating with the entire perimeter of a cavity serving as a space configured to form a molded article. A self-curable molding material with flowability is fed into the perimeter of the cavity through the gate; hence, the mold has a small number of dead ends compared with the case where, for example, the molding material is fed into the cavity through a part of the cavity, preventing the formation of bubbles left in the cavity. The arrangement of a gate and a vent each making an acute angle results in the spontaneous separation of the molded article in the cavity from solidified material portions in the gate and the vent due to shrinkage on curing.

Mold and molding method

The invention provides a film of an yttria-alumina complex oxide having a high peel strength with respect to a substrate. A mixed powder of powdery materials of yttria and alumina is sprayed on a substrate to form a sprayed film made of an yttria-alumina complex oxide. Preferably, the powdery material of yttria has a 50 percent mean particle diameter of not smaller than 0.1 &#x3bc;m and not larger than 100 &#x3bc;m, and the powdery material of alumina has a 50 percent mean particle diameter of not smaller than 0.1 &#x3bc;m and not larger than 100 &#x3bc;m. Preferably, the yttria-alumina complex oxide contains at least a garnet phase, and may further contain a perovskite phase.

Film of yttria-alumina complex oxide, a method of producing the same, a sprayed film, a corrosion resistant member, and a member effective for reducing particle generation

An electrostatic chuck and a method for manufacturing the same are provided. The electrostatic chuck has a bonded structure comprising a ceramic electrostatic chuck member, a metal member and a bonding layer. The bonding layer has at least a first outermost bonding layer joined to the ceramic electrostatic chuck member, a second outermost bonding layer joined to the metal member, and an intermediate polyimide layer disposed between the first and second outermost bonding layers. Each of the outermost bonding layers are made of a silicone layer or an acrylic.

Electrostatic chuck having bonded structure and method of manufacturing the same

A joined structure of a metal terminal and a ceramic member has a joining layer between the terminal and the ceramic member. The joining layer has a metal adhesive layer containing at least indium metal. The invention further provides a joined structure of a metal member and a ceramic member. The metal member has a tip face and a side face. A hollow is formed in the ceramic member. A joining layer is formed between a bottom surface facing the hollow and the tip face of the member, and further formed between a side wall surface facing the hollow and the side face of the member. The joining layer has a metal adhesive layer containing at least indium metal.

Joined structures of metal terminals and ceramic members, joined structures of metal members and ceramic members, and adhesive materials

A halogen gas plasma-resistant member to be exposed to a halogen gas plasma, includes a main body of said member, and a corrosion-resistant film formed at least a surface of said main body, wherein a peeling resistance of the corrosive film to said main body is not less than 15 MPa.

Halogen gas plasma-resistive members and method for producing the same, laminates, and corrosion-resistant members

A joined structure includes a metal terminal, a ceramic member and a joining layer between the metal terminal and the ceramic member. The joining layer includes a metal adhesive layer containing at least indium metal. The invention further provides a joined structure including a metal member, a ceramic member, and a joining layer. The metal member includes a tip face and a side face. A hollow portion is formed in the ceramic member. The joining layer is formed between a bottom surface facing the hollow portion and the tip face of member, and further formed between a side wall surface facing the hollow portion and the side face of the metal member. The joining layer also includes a metal adhesive layer containing at least indium metal.

A corrosion-resistive member is provided, including a corrosion-resistive face that is exposed to a corrosive gas causing ion bombardmemt. At least a part of the corrosion-resistive member is composed of a sintered silicon nitride body having an open porosity of not more than 5%. The sintered silicon nitride body constitutes the corrosion-resistive face, and if two auxiliary planes are formed by cutting the corrosion-resistive member to intersect vertically with the corrosion-resistive face and to be located vertically with respect to each other, the orientation index between the two auxiliary planes is in a range of 0.8 to 1.2, and the orientation index between the corrosion-resistive face and each of the auxiliary faces is at least 1.5.

Corrosion-resistive members

A ceramic sintered body has a dense portion and a porous portion. The dense portion is formed from sintered ceramic fine particles, and the porous portion is formed from sintered ceramic coarse particles. The fine particles and coarse particles are simultaneously subjected to pressure sintering to form the dense portion and porous portion.

Ceramic sintered bodies and a method of producing the same

The invention provides a film of an yttria-alumina complex oxide having a high peel strength with respect to a substrate. A mixture of powdery yttria and alumina materials is sprayed on a substrate to form a sprayed yttria-alumina complex oxide film. Preferably, the powdery yttria material has a 50 percent mean particle diameter in a range of 0.1 &mgr;m to 100 &mgr;m, and the powdery alumina material has a 50 percent mean particle diameter in a range of 0.1 &mgr;m to 100 &mgr;m. Preferably, the yttria-alumina complex oxide contains at least garnet phase, and may further contain perovskite phase.

This invention relates to a corrosion-resistant member having a resistance to plasma of a halogen based corrosive gas, which comprises a main body and a corrosion-resistant layer formed on a surface of the main body and containing a fluoride of at least one element selected from the group consisting of rare earth elements and alkaline earth elements.

Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same

To prevent an exposed surface of an anticorrosive part for an etching apparatus from being corroded, even when a highly corrosive etching gas such as a chlorine-based or fluorine-based plasma gas is used, an anticorrosive part for the etching apparatus for effecting etching treatment is provided. The anticorrosive part includes an anticorrosive part substrate, and a film of silicon carbide covering that surface of the anticorrosive part substrate which is to be exposed to an etching gas, wherein the silicon carbide film is made of polycrystals of silicon carbide having a 3C crystalline system, and (111) planes of the silicon carbide polycrystals are oriented in parallel to the surface of the silicon carbide film.

Anti-corrosive parts for etching apparatus

A silicon nitride sintered material includes a polycrystal material having silicon nitride crystal grains and a grain boundary phase. The sintered material contains a Yb element in an amount of 2 to 30% by weight in terms of its oxide and an Al element in an amount of 1 to 20% by weight in terms of its oxide and has a thermal conductivity of 40 W/mK or less at room temperature, a resistivity of 1&times;10 to 1&times;10 &OHgr;&middot;cm at room temperature, and a porosity of 0.5% or less.

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Ogaki, Japan

Tsuneaki Ohashi