Mitsumi Electric Company Ltd.

Fuji Photo Film Company, Limited

Fujifilm Corporation

Tsukasa Yamada

Toyoki Tanaka

Takahiko Nishiyama

Soumei Takahashi

Toru Harada

Isao Ikuhara

Takahiro Wakasugi

Yoshiharu Yabuki

Yasuo Mukunoki

Kentaro Shiratsuchi

Satoru Toda

Hisamichi Sekine

Takumi Ando

Masato Ehara

Shinobu Kasahara

Hiroyuki Seki

Hisashi Okada

Kiyokazu Hashimoto

Taku Nakamura

Akihiro Matsufuji

Tadashi Inaba

Tomokazu Yasuda

Junji Nishigaki

Hirohisa Hokazono

Ryuta Suzuki

Tadashi Ono

Kenichi Hori

Ken'ichi Hori

Hisanori Aga

Yuuzou Muramatsu

Shigemitsu Watanabe

Yuki Maruyama

Akira Shiga

Tsuyoshi Ishii

Kenichiro Hatayama

Toshihiko Maekawa

Masaki Kasahara

Ren Sugiyama

Masanobu Fujii

Kiyohide Sakihama

Masato Shimoyama

Shin-ichi Sakaguchi

An optical deflection apparatus includes an optical deflection part configured to deflect light incident on a reflection surface by swinging the reflection surface about a swing axis, and a light transmission plate configured to transmit the light deflected by the optical deflection part, wherein an inclination angle of the light transmission plate with reference to a reference surface is equal to or greater than twice a maximum swing angle of the reflection surface with reference to the reference surface.

Optical deflection apparatus and image projection apparatus

The present invention is to provide an optical scanner module. An optical scanner apparatus scans laser light by oscillating a mirror with a piezoelectric element. A package that mounts the optical scanner apparatus and electrically is connected to a substrate via a connector. A package cover that is fixed to the package and seals the optical scanner apparatus so that the optical scanner apparatus is not visually recognized from an outside. The package and the package cover are bonded by a heat curing adhesive agent. A vent for releasing gas in a space where the optical scanner apparatus is sealed is formed in the package cover, and the vent is blocked by ultraviolet curing resin.

Optical scanner module and method for fabricating optical scanner module

An actuator includes: a first drive beam provided to swing and drive a target object around a first axis and having a first drive source on a front surface; a second drive beam that has a zigzag shape, in which a plurality of beams extending in a direction vertical to a second axis orthogonal to the first axis are included and in which end portions of the beams adjacent with each other are connected at turn portions, and that is provided to swing and drive the object around the second axis, and having a second drive source on a front surface; a fixed frame connected to and support the second drive beam; and a rib formed on a back surface of the second drive beam and at a position away from a connection position of the beams with the turn portions toward the second axis.

Actuator and optical scanning device

An optical scanning device includes a drive beam configured to support a mirror, and a drive source provided on the drive beam and configured to oscillate the mirror about a predetermined axis passing through the center of the light reflecting surface of the mirror. The drive beam includes multiple beams each extending in a direction perpendicular to the predetermined axis and one or more turn-back parts each connecting ends of adjacent beams, and has a zigzag shape as a whole. The multiple beams include a first beam, a second beam adjacent to the first beam, and a third beam adjacent to the second beam, the one or more turn-back parts include a first turn-back part connecting the first and second beams and a second turn-back part connecting the second and third beams, and the first and second turn-back parts are different in weight.

Optical scanning device

An actuator includes a torsion beam configured to support a target object, a first drive beam having a first drive source, and a connection beam configured to connect the torsion beam with the first drive beam, and a frame body configured to fix the first drive beam, wherein the actuator applies force of rotating the torsion beam in a direction around a first axis by a resonant drive of the first drive beam so as to cause the target object to swing, and when a structural non-linear constant of the actuator is &#x3b2; [Nm/rad3] and a spring constant of the actuator is k [Nm/rad], [Equation 1] is satisfied:[Equation 1]&#x3b2;=0.05&#xd7;&#xd7;10&#x2003;&#x2003;(1),where 3.5&#x2264;A&#x2264;15.5.

Actuator and light scanning apparatus

An optical scanning device includes a mirror including a light reflection surface, a mirror support structure that supports the mirror, a pair of first driving beams connected to the mirror support structure and disposed on the corresponding sides of the mirror support structure, first driving sources disposed on the first driving beams and configured to cause the mirror to rotate around a first axis that passes through the center of the light reflection surface, and a fixed frame that supports the first driving beams. The center of gravity of the mirror and the mirror support structure is located on the first axis.

The present invention is to provide an optical scanner module capable of reducing cross-talk generated between a sensor interconnect and a drive interconnect. An optical scanner module, includes an optical scanner apparatus that scans incident light by oscillating a mirror; and a package on which the optical scanner apparatus is mounted, wherein the optical scanner apparatus includes a displacement sensor that detects an oscillation angle of the mirror, wherein a sensor interconnect (P) connected to the displacement sensor and a drive interconnect through which a drive signal for oscillating the mirror passes are respectively drawn from the optical scanner apparatus into the package, wherein interconnect layers (L, L) in which the sensor interconnect and the drive interconnect (P) are formed are stacked, wherein the sensor interconnect and the drive interconnect are placed not to overlap in a plan view of the interconnect layers, and wherein a GND interconnect (P) is provided between the sensor interconnect and the drive interconnect that are adjacent in a same interconnect layer.

Optical scanner module and optical scanner control apparatus

An optical scanning device is provided. The optical scanning device includes a mirror having an optical reflection surface, a movable frame supporting the mirror, a pair of drive beams supporting the movable frame from both sides, a drive source, disposed on the drive beams, that causes the movable frame to be swung around a predetermined axis, a fixed frame supporting the drive beams. Each of the drive source includes a lower electrode formed on the drive beams, a piezoelectric thin film formed on the lower electrode, an upper electrode formed on the piezoelectric thin film, and a stress counter film, formed on the upper electrode or formed between the piezoelectric thin film and the upper electrode, that generates a compressive stress on the drive beams.

Optical scanning device and manufacturing method of optical scanning device

An optical scanning device according to an embodiment of the present invention includes a mirror that has an optical reflection surface; a movable frame that supports the mirror; a pair of drive beams that support the movable frame from both sides; drive sources that are disposed on the drive beams and cause the movable frame to be swung around a predetermined axis that passes through the center of the optical reflection surface; and a fixed frame that supports the drive beams. A movable frame connection part, via which the movable frame and one of the drive beams are connected, is substantially arranged on a side opposite to a side on which a fixed frame connection part, via which the fixed frame and the one of the drive beams are connected, is arranged, with respect to the predetermined axis.

An optical scanner apparatus that oscillates a mirror to scan incident light, includes an optical scanner unit that includes a sensor that detects an oscillation angle of the mirror, and an interconnect connected to the sensor; and a shading unit that shades the sensor and the interconnect from stray light of the incident light and ambient light.

Optical scanner apparatus

An optical scanning device includes a mirror part including a mirror reflecting surface to reflect incident light, a pair of torsion bars configured to support the mirror part from both sides and configured to form a first axis around which to swing the mirror part by a torsional motion thereof so as to deflect the reflected light, and at least one stress alleviation area configured to alleviate a stress generated by the torsional motion of the torsion bars. The alleviation area is provided between an intersection of a second axis perpendicular to the first axis and passing through the center of the mirror reflecting surface and an edge of the mirror reflecting surface, and at least one of the torsion bars.

An optical scanning device includes a mirror part including a mirror reflecting surface to reflect incident light, a pair of torsion bars configured to support the mirror part from both sides and configured to forma first axis around which to swing the mirror part by a torsional motion thereof so as to deflect the reflected light, and at least one stress alleviation area configured to alleviate a stress generated by the torsional motion of the torsion bars. The alleviation area is provided between an intersection of a second axis perpendicular to the first axis and passing through the center of the mirror reflecting surface and an edge of the mirror reflecting surface, and at least one of the torsion bars.

A piezoelectric actuator including first and second piezoelectric cantilevers is disclosed. Wirings are provided on an upper surface of a support body on which the first and second piezoelectric cantilevers are formed. The wirings are formed of patterned metal films.

Piezoelectric actuator and a method of manufacturing the same

Disclosed is an optical scanning device, including a mirror, a first drive beam configured to swing the mirror around a first axis, and a second drive beam configured to swing the mirror around a second axis, wherein the second drive beam is provided in such a manner that a plurality of beams extending in a direction intersecting with a direction of the second axis are joined with adjacent beams at edge portions thereof, and thereby has a zigzag shape, and each of the plurality of beams includes a rib extending in a direction of a width of the beam.

An actuator includes: a pair of supporting beams to support an object from both sides thereof in a direction parallel to an axis of rotation; a pair of movable beams to sandwich the object and the pair of supporting beams from both sides in a direction perpendicular to the axis of rotation; a plurality of beams to sandwich the pair of movable frames from both sides thereof in the direction perpendicular to the axis of rotation and support the object; a resonant drive source to apply bending vibration to the pair of movable frames and drive the object around the axis of rotation when a resonant drive operation is performed; and a non-resonant drive source to apply bending vibration to the plurality of beams and tilt and drive the object around a second axis of rotation perpendicular to the axis of rotation when a non-resonant drive operation is performed.

Growing community of inventors

Tokyo, Japan

Tsukasa Yamada