Horiba, Ltd.

Nippon Soken, Inc.

Tsukasa Satake

Atsuhiro Sumiya

Itsuhei Ogata

Hiroshi Funakubo

Juichiro Ukon

Kimio Miyatake

Koji Tominaga

This invention provides a thin film deposition process making it possible to form a thin film having a desired composition with good reproducibility and high efficiency; a thin film deposition device therefore; a FTIR gas analyzer used in the thin film deposition process; and a mixed gas supplying device used in the thin film deposition process. The thin film deposition process comprises the steps of mixing a plurality of organic metal gases in a gas mixing chamber and supplying the mixed gas into a reaction chamber to deposit a thin film on a substrate positioned in the reaction chamber, wherein the mixture ratio between/among the organic metal gases supplied into the gas mixing chamber is measured with a FTIR gas analyzer fitted to either the gas mixing chamber or the reaction chamber and then on the basis of results of the measurement, the flow rates of the organic metal gases are individually adjusted.

Thin film deposition device using an FTIR gas analyzer for mixed gas supply

A solid object carrying a catalyzer thereon is placed in a closed reaction chamber into which test gases are supplied and is heated up to a temperature of 1000.degree. C. Adsorbates are formed on the surface of the solid object under the test gas flow in the closed reaction chamber. Infrared radiations radiated from the adsorbates are emitted through an infrared-transmissive window hermetically formed on a wall of the closed reaction chamber, and are analyzed by an infrared radiation spectrometer and observed by a microscope. The infrared-transmissive window is cooled down by a cooling device attached thereto so that the temperature of the window does not exceed a certain level, e.g., 200.degree. C. Thus, the adsorbates formed on the solid object can be detected and analyzed under conditions where the test gas is actually flowing and the temperature of the solid object is elevated up to a high level. Since the infrared-transmissive window is cooled down and prevented from being broken by heat, the detection and analysis of the adsorbates are performed safely.

Apparatus for detecting and analyzing adsorbates

An infrared spectrometer disperses a radiation ray from a catalyst which has been exposed to a gas for evaluation to adsorb adsorbates thereon, and outputs spectral data in accordance with a wavenumber of the radiation ray to a computer storing reference data. The computer normalizes the spectral data and the reference data, and then, it calculates a product of the normalized spectral data and the reference data. Thereafter, a function of the product is differentiated with respect to the wavenumber to obtain a differential function. Accordingly, a specified wavenumber for which the differential function is zero is determined, so that the common peak of the spectral data and the reference data at the specified wavenumber is accurately determined.

Apparatus for determining kinds of adsorbates

A sample gas is introduced into a sample cell housed in a cell block. A self-operated temperature-controlling type heater is disposed within the hollow place of the cell block and said sample cell is indirectly heated by the heat from said heater.

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Ootsu, Japan

Tsukasa Satake