Ushio Denki Kabushiki Kaisha

Tsukasa Matsuo

Masashi Okamoto

When the optical system is illuminated with an illumination light flux emitted from one extant input image point, an interference image generated by superimposing an extant output light flux output from the optical system and a reference light flux coherent with the extant output light flux is imaged to acquire interference image data, and thus to acquire measured phase distribution, and this acquisition operation is applied to each extant input image point. Thus, each measured phase distribution is expanded by expanding functions &#x3bc;n(u, v) having coordinates (u, v) on a phase defining plane as a variable to be represented as a sum with coefficients &#x3a3;n{Ajn&#xb7;&#x3bc;n(u, v)}. When the optical system is illuminated with a virtual illumination light flux, a phase &#x3a8;(u, v) of a virtual output light flux is determined by performing interpolation calculation based on coordinates of a virtual light emitting point.

Optical system phase acquisition method and optical system evaluation method

When an optical system is illuminated with illumination light fluxes emitted from respective input image points, an interference image generated by superimposing output light fluxes output from the optical system and a reference light flux coherent with the output light fluxes is imaged to acquire interference image data collectively including information of an interference image about all input image points. Diffractive optical light propagation simulation is performed to acquire a phase distribution associated with only light emitted from a single input image point at a position where reconstructed light fluxes to the respective output light fluxes are separated into each light flux. In each input image point, this simulation is performed to acquire a phase distribution on an exit pupil plane.

Growing community of inventors

Tokyo, Japan

Tsukasa Matsuo