Seiko Epson Corporation

Seiko Epscon Corporation

Tsukasa Funasaka

Yuki Hanamura

Tomoaki Nakamura

Makoto Furuhata

Yasuharu Hashimoto

Hiromu Miyazawa

Hiroshi Ito

Takeo Funakawa

Masayoshi Yamada

Osamu Miyazawa

Hajime Miyazaki

Osamu Takahashi

Kanechika Kiyose

Takashi Yamazaki

Jiro Tsuruno

Shinji Sakurai

Satoshi Taguchi

Kazuhiko Amano

Hiroshi Matsuda

Yasunori Onishi

Nozomu Hirokubo

Kazushige Umetsu

Kazuto Yoshimura

Koji Higuchi

Eiichi Nagasaka

Fumitaka Kitamura

Masahito Yoshino

An ultrasonic device includes: a substrate provided with a first opening and a second opening; a support film that is provided on the substrate and blocks the first opening and the second opening; a transmitting piezoelectric film that is provided on the support film at a position which overlaps the first opening when viewed in a thickness direction of the substrate and is interposed between a pair of electrodes in the thickness direction of the substrate; and a receiving piezoelectric film that is provided on the support film at a position which overlaps the second opening when viewed in the thickness direction of the substrate and is interposed between a pair of electrodes in the thickness direction of the substrate. In the thickness direction of the substrate, a thickness dimension of the transmitting piezoelectric film is smaller than a thickness dimension of the receiving piezoelectric film.

Ultrasonic device, ultrasonic module, and ultrasonic measuring apparatus

A diaphragm compressor includes first structure having a first pressing part, a first diaphragm, and a first substrate partially separated from the first diaphragm and partially joined to the first diaphragm, a second structure having a second pressing part, a second diaphragm, and a second substrate partially separated from the second diaphragm and partially joined to the second diaphragm, the first structure and the second structure being stacked in a stacking direction in which the first diaphragm and the first substrate are stacked, wherein the first pressing part is placed at sides of the first diaphragm opposite to the first substrate, and a first separation portion between the first diaphragm and the first substrate is part of a first channel in which a fluid flows, the second pressing part is placed at sides of the second diaphragm opposite to the second substrate, and a second separation portion between the second diaphragm and the second substrate is part of a second channel in which a fluid flows, the first channel and the second channel are placed in series, as seen from the stacking direction, the first pressing part overlaps the second pressing part, and a buffer chamber holding the fluid is provided between the first channel and the second channel.

Diaphragm compressor, cooling unit, projector, recording apparatus, and three-dimensional modeled object manufacturing apparatus

A displacement magnifying device includes a diaphragm structure including a substrate and a diaphragm provided separately from the substrate, actuators provided side by side with the diaphragm structure, and a first member including displacing sections coupled to both ends of the actuators and displaced according to displacement of the actuators. The displacing sections are coupled to the diaphragm of the diaphragm structure.

Displacement magnifying device, diaphragm type compressor, cooling unit, projector, recording apparatus, and three-dimensional molded object manufacturing apparatus

A diaphragm-type compressor includes a substrate, a diaphragm, and an actuator, the substrate, the diaphragm, and the actuator being laminated and provided in this order. In a plan view from a direction of the lamination, the diaphragm includes a first film section that overlaps the actuator and a second film section that does not overlap the actuator. A step is provided on a surface at the diaphragm side of the substrate. A portion corresponding to the first film section and a portion corresponding to the second film section of the substrate are respectively different stages.

Diaphragm-type compressor, projector, cooler, and method for compressing fluid

A structure according to an embodiment includes a first substrate including a first valve and a second substrate joined to the first substrate. The structure includes a region where the first valve and the second substrate are not joined. A sticking suppressing section is provided in at least one of the first valve and the second substrate in the region. By configuring the structure in this way, it is possible to suppress sticking of the first valve to the second substrate in the structure including the first substrate including the first valve and the second substrate joined to the first substrate.

Structure, diaphragm-type compressor, cooler, projector, and method for manufacturing structure

A diaphragm-type compressor includes a substrate, an actuator, a diaphragm provided between the substrate and the actuator, and a case in which the diaphragm, the actuator, and the substrate are provided. A recessed section formed at the actuator side of the substrate and the actuator overlap in a plan view. The case has an inflow port of fluid further on the actuator side than the substrate based on the position of the diaphragm. The substrate includes a suction port for causing the recessed section to suck the fluid.

Diaphragm-type compressor, cooler, projector, and method for compressing fluid

A cooling device of an optical element includes a circulation passage through which a fluid circulates. The circulation passage includes a window portion that is disposed on an incidence side or an emission side of the optical element and transmits light, an evaporation portion that is connected to the window portion and includes a plurality of channel portions, and a heat radiation portion that radiates heat of the fluid. The fluid transmits the light in a liquid state. The fluid is a liquid in the window portion. The fluid that is a liquid evaporates to vapor in the plurality of channel portions. The fluid that is vapor condenses into a liquid in the heat radiation portion. A sectional area of each channel portion is less than a sectional area of a boundary between the window portion and the evaporation portion.

Cooling device and projector

An ultrasonic device includes: a substrate provided with a first opening and a second opening; a support film that is provided on the substrate and closes the first opening and the second opening; a transmitting piezoelectric film that is provided on the support film at a position which overlaps the first opening when viewed in a thickness direction of the substrate and that is sandwiched between a pair of electrodes in the thickness direction of the substrate; and a receiving piezoelectric film that is provided on the support film at a position which overlaps the second opening when viewed in the thickness direction of the substrate and that is sandwiched between a pair of electrodes in an intersecting direction intersecting with the thickness direction of the substrate.

Ultrasonic device, ultrasonic module, and ultrasonic measuring device

A piezoelectric element which includes a vibrating film, a piezoelectric body disposed on one surface of the vibrating film, and a horizontal electrode structure in which electrodes are disposed at a predetermined gap therebetween on the piezoelectric body. The vibrating film includes a recess portion in a portion corresponding to the predetermined gap in plan view.

Piezoelectric element, probe, and ultrasonic measurement apparatus

A piezoelectric element includes a vibrating film, a piezoelectric body, a first electrode, a second electrode, and a groove. The piezoelectric body is arranged upon the vibrating film. The first electrode is arranged upon the piezoelectric body. The second electrode is arranged upon the piezoelectric body and at a position that is separated from the first electrode. The groove is located between the first electrode and the second electrode and splits a surface of the piezoelectric body in two, as seen in plan view from a thickness direction of the vibrating film.

Piezoelectric element, piezoelectric device, probe, electronic machine, and ultrasonic image apparatus

An optical filter includes first and second substrates, first and second mirrors, and first and second electrodes. The first substrate has a flat surface. The second substrate includes a first surface, a second surface and a third surface, the second surface surrounding the first surface in a plan view, the third surface surrounding the second surface in a plan view, a height of the first surface above the second surface being lower than a height of the third surface above the second surface, the first surface and the second surface facing the flat surface of the first substrate. The first mirror is disposed on the flat surface of the first substrate. The second mirror is disposed on the first surface of the second substrate, the second mirror facing the first mirror. The first electrode is disposed on the flat surface of the first substrate. The second electrode is disposed on the second surface of the second substrate, the second electrode facing the first electrode.

Optical filter and optical module provided with same

An ultrasonic transducer device includes an ultrasonic transducer element array, a first signal terminal, and a second signal terminal. The ultrasonic transducer element array has a 1element group to a kelement group (where k is a natural number such that k&#x2267;2). The first signal terminal is connected with a control section configured and arranged to perform at least one of receiving and transmitting of signals. The second signal terminal is connected with the first signal terminal via the ultrasonic transducer element array. Each of the 1element group to the kelement group includes a plurality of ultrasonic transducer elements electrically connected in series. The 1element group to the kelement group are electrically connected in parallel between the first signal terminal and the second signal terminal.

Ultrasonic transducer device, head unit, probe, and ultrasonic imaging apparatus

An optical filter includes a first substrate, a first mirror formed on the first substrate, a second substrate coupled to the first substrate, the second substrate including a concave portion, a second mirror formed on the concave portion and facing the first mirror, and an electrode formed on the second substrate and around the second mirror. The first substrate includes a plurality of first hinge portions and a plurality of second hinge portions inside the plurality of first hinge portions.

Optical filter and optical module having optical filter

An optical filter includes: a first substrate and a second substrate that are disposed to face each other; a first mirror and a first electrode that are disposed on the second substrate side of the first substrate; and a second mirror and a second electrode that are disposed on the first substrate side of the second substrate, wherein the first mirror and the second mirror are connected via a wire.

Optical filter, optical filter device, analyzer, and method for manufacturing optical filter

An optical filter includes first and second substrates, first and second mirrors and first and second electrodes. The second substrate includes first, second and third surfaces. The second surface surrounds the first surface in a plan view, and the third surface surrounds the second surface in a plan view. A second height of the second surface is lower than a first height of the first surface, and a third height of the third surface is higher than the first height of the first surface. The first, second and third surfaces face a single flat surface of the first substrate. The first mirror is disposed on the first substrate. The second mirror is disposed on the first surface of the second substrate. The first electrode is disposed on the first substrate. The second electrode is disposed on the second surface of the second substrate and faces the first electrode.

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Shiojiri, Japan

Tsukasa Funasaka