Industrial Technology Research Institute

Tse-Min Deng

Ming-Wei Chang

Tsung-Ju Gwo

Zhen-Yuan Chung

Da-Chen Pang

Te-I Chiu

Mu-Yue Chen

Ping-Ta Tai

A capacitive ultrasonic transducer includes a first electrode, an insulating layer formed on the first electrode, at least one support frame formed on the insulating layer, and a second electrode formed space apart from the first electrode, wherein the first electrode and the second electrode define an effective area of oscillation of the capacitive ultrasonic transducer, and the respective length of the first electrode and the second electrode defining the effective area of oscillation is substantially the same.

Method of fabricating capacitive ultrasonic transducers

A capacitive ultrasonic transducer includes a flexible layer, a first conductive layer on the flexible layer, a support frame on the first conductive layer, the support frame including a flexible material, a membrane over the support frame being spaced apart from the first conductive layer by the support frame, the membrane including the flexible material, a cavity defined by the first conductive layer, the support frame and the membrane, and a second conductive layer on the membrane.

Method for fabricating capacitive ultrasonic transducers

A capacitive ultrasonic transducer includes a first electrode, an insulating layer formed on the first electrode, at least one support frame formed on the insulating layer, and a second electrode formed spaced apart from the first electrode, wherein the first electrode and the second electrode define an effective area of oscillation of the capacitive ultrasonic transducer, and the respective length of the first electrode and the second electrode defining the effective area of oscillation is substantially the same.

Capacitive ultrasonic transducer and method of fabricating the same

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Hsinchu, Taiwan

Tse-Min Deng