Winbond Electronics Corporation

Tse-Mian Kuo

Po-Yen Hsu

Bo-Lun Wu

Shih-Ning Tsai

Chu-Chun Hsieh

Wei-Che Chang

Shuo-Che Chang

A method of fabricating a resistive random access memory cell includes the following steps. A second sacrificial layer is formed around a patterned stacked layer. An opening passing through first conductive layers and first sacrificial layers of the patterned stacked layer is formed. A second conductive layer is formed in the opening, and the second conductive layer and the first conductive layers form a first electrode layer. The first sacrificial layers and the second sacrificial layer are removed. A variable resistance layer and an oxygen reservoir layer are formed. The oxygen reservoir layer is patterned to form a patterned oxygen reservoir layer and expose the variable resistance layer. A second dielectric layer is formed on the variable resistance layer and the patterned oxygen reservoir layer. A second electrode is formed in the second dielectric layer.

Method of fabricating resistive random access memory cell

A memory device includes a substrate, an electrical channel layer, a first electrode, a resistive switching layer, a second electrode, and a conductive structure. The electrical channel layer is disposed on the substrate. The first electrode is disposed on the substrate and extends into the electrical channel layer. The resistive switching layer is disposed between the first electrode and the electrical channel layer. The second electrode is disposed on the electrical channel layer. The conductive structure connects the electrical channel layer and the second electrode.

Memory structures and methods for forming the same

A resistive random access memory cell includes a first electrode layer, an oxygen reservoir layer, a variable resistance layer, and a second electrode. The first electrode layer is located on a dielectric layer, and includes a body part extending in a first direction and multiple extension parts connected to a sidewall of the body part and extending in a second direction. The second direction is perpendicular to the first direction. The oxygen reservoir layer covers the first electrode layer. The variable resistance layer is located between the first electrode layer and the oxygen reservoir layer. The second electrode is located above a top surface of the oxygen reservoir layer and around an upper sidewall of the oxygen reservoir layer.

Resistive random access memory cell and method of fabricating the same

A resistive memory including a substrate, a first electrode, a second electrode, a resistance changeable layer and an oxygen reservoir layer is provided. The first electrode is located on the substrate. The second electrode is located between the first electrode and the substrate. The resistance changeable layer is located between the first electrode and the second electrode. The oxygen reservoir layer is located between the first electrode and the resistance changeable layer. The oxygen reservoir layer includes a first portion, a second portion and a third portion. The second portion is connected to one side of the first portion. The third portion is connected to the other side of the first portion. A thickness of the first portion is greater than a thickness of the second portion and a thickness of the third portion. The first portion of the oxygen reservoir layer protrudes toward the first electrode.

Resistive memory

A resistive random access memory, including a first electrode layer and a second electrode layer disposed opposite to each other, a variable resistance layer located between the first electrode layer and the second electrode layer, an oxygen exchange layer located between the variable resistance layer and the second electrode layer, a vacancy-supplying layer surrounding a middle sidewall of the oxygen exchange layer; and a vacancy-driving electrode layer located on the vacancy-supply layer and surrounding an upper sidewall of the oxygen exchange layer, is provided. A method of fabricating the resistive random access memory is also provided.

Resistive random access memory and method of fabricating the same

A semiconductor structure includes a substrate, a first electrode, a vacancy supply layer, a sidewall barrier layer, an oxygen reservoir layer, a resistive switching layer, and a second electrode. The first electrode is disposed on the substrate. The vacancy supply layer is disposed on the first electrode. The sidewall barrier layer is disposed on the first electrode. The oxygen reservoir layer is disposed on the first electrode. The sidewall barrier layer is disposed between the oxygen reservoir layer and the vacancy supply layer. The resistive switching layer is disposed on the vacancy supply layer. The second electrode is disposed on the resistive switching layer.

Semiconductor structure and method of forming the same

Provided are a resistive random access memory and a method of manufacturing the same. The resistive random access memory includes a stacked structure and a bit line structure. The stacked structure is disposed on a substrate. The stacked structure includes a bottom electrode, a top electrode and a resistance-switching layer. The bottom electrode is disposed on the substrate. The top electrode is disposed on the bottom electrode. The resistance-switching layer is disposed between the bottom electrode and the top electrode. The bit line structure covers a top surface of the stacked structure and covers a portion of a sidewall of the stacked structure. The bit line structure is electrically connected to the stacked structure.

Resistive random access memory and method of manufacturing the same

A resistive random access memory is provided. The resistive random access memory includes a substrate, a first dielectric layer, a bottom electrode, a resistance switching layer, an oxygen exchange layer, a barrier layer and a top electrode. The first dielectric layer is disposed on the substrate. The bottom electrode is disposed on the first dielectric layer. The resistance switching layer is disposed on the bottom electrode. The oxygen exchange layer is disposed on the resistance switching layer. A contact area between the oxygen exchange layer and the resistance switching layer is smaller than a top surface area of the resistance switching layer. The barrier layer is disposed on the oxygen exchange layer. The top electrode is disposed on the barrier layer.

A non-volatile memory device is provided. The non-volatile memory device includes a tunneling oxide layer, a floating gate, a dielectric layer, and a control gate. The tunneling oxide layer is formed on a substrate. The floating gate is formed on the tunneling oxide layer, and includes a first polysilicon layer, a second polysilicon layer, and a nitrogen dopant. A grain of the first polysilicon layer has a first grain size, and a grain of the second polysilicon layer has a second grain size that is greater than the first grain size. The nitrogen dopant is formed in interstices between the grains of the first polysilicon layer. The dielectric layer includes a first nitride film, an oxide layer, a nitride layer, and an oxide layer conformally formed on the floating gate. The control gate is formed on the dielectric layer.

Non-volatile memory device

A non-volatile memory device and its manufacturing method are provided. The non-volatile memory device includes a tunneling oxide layer, a floating gate, a dielectric layer, and a control gate. The tunneling oxide layer is formed on a substrate. The floating gate is formed on the tunneling oxide layer, and includes a first polysilicon layer, a second polysilicon layer, and a nitrogen dopant. A grain of the first polysilicon layer has a first grain size, and a grain of the second polysilicon layer has a second grain size that is greater than the first grain size. The nitrogen dopant is formed in interstices between the grains of the first polysilicon layer. The dielectric layer includes a first nitride film, an oxide layer, a nitride layer, and an oxide layer conformally formed on the floating gate. The control gate is formed on the dielectric layer.

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Taipei, Taiwan

Tse-Mian Kuo