Applied Materials, Inc.

Trung T Doan

Steven M Zuniga

Hung Chih Chen

Jeonghoon Oh

Charles C Garretson

Sidney P Huey

Douglas R McAllister

Danny Cam Toan Lu

Stacy Meyer

James Chang Wang

Venkata R Balagani

Jeffrey P Schmidt

Martin S Wohlert

Michael Jon Fong

Kerry F Hughes

Aden Martin Allen

Romain Beau De Lamenie

Jian Lin

A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portions. The lapping can be performed using a machine that dedicated for use in lapping the bottom surface of retaining rings. During the lapping the ring can be permitted to rotate freely about an axis of the ring. The bottom surface of the retaining ring can have curved or flat portions.

Method of forming retaining ring with shaped surface

Growing community of inventors

Baoshan Hsinchu, Taiwan

Trung T Doan