Entegris, Inc.

Troy B Scoggins

Rex Gerald Sheppard

Abuagela H Rashed

Jonathan Loyd Burr

Jeffrey J Spiegelman

Daniel Alvarez, Jr

Carlo Waldfried

Mackenzie E King

Oleg P Kishkovich

William M Goodwin

Joshua T Cook

James Lo

Xavier Gabarre

Tram Doan Nguyen

Daniel A Lev

Christopher James Yannetta

William Goodwin

Daniel Alvarez

A silicon carbide-graphite composite is described, including (i) interior bulk graphite material and (ii) exterior silicon carbide matrix material, wherein the interior bulk graphite material and exterior silicon carbide matrix material inter-penetrate one another at an interfacial region therebetween, and wherein graphite is present in inclusions in the exterior silicon carbide matrix material. Such material may be formed by contacting a precursor graphite article with silicon monoxide (SiO) gas under chemical reaction conditions that are effective to convert an exterior portion of the precursor graphite article to a silicon carbide matrix material in which graphite is present in inclusions therein, and wherein the silicon carbide matrix material and interior bulk graphite material interpenetrate one another at an interfacial region therebetween. Such silicon carbide-graphite composite is usefully employed in applications such as implant hard masks in manufacturing solar cells or other optical, optoelectronic, photonic, semiconductor and microelectronic products, as well as in ion implantation system materials, components, and assemblies, such as beam line assemblies, beam steering lenses, ionization chamber liners, beam stops, and ion source chambers.

Silicon carbide/graphite composite and articles and assemblies comprising same

Described are molds that include a ceramic material at a surface, as well as methods of forming the molds, and methods of using the molds; the ceramic material is constituted substantially, mostly, or entirely of three elemental components designated M, A, and X; the 'M' component is at least one transition metal; the 'A' component is one or a combination of Si, Al, Ge, Pb, Sn, Ga, P, S, In, As, Tl, and Cd; and the &#x201c;X&#x201d; component is carbon, nitrogen, or a combination thereof.

Molds that include a ceramic material surface, and related methods for making and using the molds

Described are silicon carbide filters for use with liquid metals such as liquid tin, as well as methods of using such a filter to remove particles from the liquid metal, and systems and processes that use the filtered liquid metal.

Silicon carbide filter membrane and methods of use

Described are glass-forming molds made of a graphite mold body and a coating formed by atomic layer deposition, with the coating being made of alumina or a combination of alumina and yttria.

Coatings for glass-shaping molds and molds comprising the same

A carbon material is described, having utility for fabricating an electrode of an electrochemical energy device, wherein the carbon material includes a particulate carbon having a particle size din a range of from 1 to 15 &#x3bc;m, a bulk density in a range of from 0.3 g/cc to 1.2 g/cc, a surface area as measured by nitrogen BET surface area determination at 25&#xb0; C. that does not exceed 10 m/g, and an impurity content of less than 3000 ppm by weight, based on weight of the carbon material. Such carbon material may be utilized in amorphous or graphitic form in an electrode of an electrochemical energy device, such as a negative electrode of a lithium-ion battery or a lithium-ion hybrid capacitor.

Carbon electrode and lithium ion hybrid capacitor comprising same

The present invention provides a method, system, and components for protecting reticles and specifically for minimizing haze formation on reticles during storage and use. By substantially continually maintaining a purge in a storage housing having a reduced humidity level on reticles or by temporarily storing the reticle in a container in proximity to a desiccant or getter when not being purged, haze formation can be eliminated, minimized, or sufficiently controlled. Moreover, a filter media in the container may be positioned to be 'recharged' during the substantially continual purging of the reticle, a reduced desirable humidity level can be readily maintained in the reticle container when the container is not currently being purged. Additionally, the system of the invention can comprise an ionizer associated with the purge system. For example, the ionizer can be associated with at least one of the plurality of purge lines of the purge system. The system of the invention can also include a purge gas source connected to the purge system that comprises a source of CDA or extra CDA. The storage housing can comprise a plurality of shelves that each include a plurality of reticle storage receptacles.

System for purging reticle storage

A method for hydride gas purification uses materials having at least one lanthanide metal or lanthanide metal oxide. The method reduces contaminants to less than 100 parts per billion (ppb), preferably 10 ppb, more preferably 1 ppb. The material can also include transition metals and transition metal oxides, rare earth elements and other metal oxides. The invention also includes materials for use in the method of the invention.

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San Diego, CA, United States of America

Troy B Scoggins