National Semiconductor Corporation

Trevor Niblock

Peter J Hopper

Peter B Johnson

Roozbeh Parsa

Vladislav Vashchenko

Gerard Dirk Smits

Mark Willam Poulter

A MEMS magnetic flux switch is fabricated as a ferromagnetic core. The core includes a center cantilever that is fabricated as a free beam that can oscillate at a resonant frequency that is determined by its mechanical and material properties. The center cantilever is moved by impulses applied by an associated motion oscillator, which can be magnetic or electric actuators.

Method of switching a magnetic MEMS switch

A micro-electromechanical (MEMS) relay decouples a flux path from magnetic actuation from the electrical path through the switch to eliminate signal degradations that result from fluctuations in the current around the core and, thereby the flux. In addition, the MEMS relay has a suspension structure that is independent of the core.

MEMS relay with a flux path that is decoupled from an electrical path through the switch and a suspension structure that is independent of the core structure and a method of forming the same

Magnetic MEMS switching regulator

A switch structure substantially reduces the effect of contact resistance by placing two mechanical switches in parallel between a source and a load, and sequentially closing and opening the mechanical switches so that one switch closes before the other switch, and opens after the other switch. The switch structure with the two mechanical switches can be realized with standard micro machined switches or as a micro-electromechanical system (MEMS) cantilever switch.

Mechanical switch that reduces the effect of contact resistance

An electromechanical memory cell utilizes a cantilever and a laterally positioned electrode. The cantilever is spaced apart from the electrode by a distance that is greater than the elastic limit of the cantilever. The memory cell is programmed by applying voltages to the cantilever and the electrode which causes the cantilever to move into a region of plastic deformation without ever touching the electrode.

Multi-state electromechanical memory cell

A method of forming an actuator and a relay using a micro-electromechanical (MEMS)-based process is disclosed. The method first forms the lower sections of a square copper coil, and then forms an actuation member that includes a core section and a horizontally adjacent floating cantilever section. The core section, which lies directly over the lower coil sections, is electrically isolated from the lower coil sections. The method next forms the side and upper sections of the coil, along with first and second electrodes that are separated by a switch gap. The first electrode lies directly over an end of the core section, while the second electrode lies directly over an end of the floating cantilever section.

Method of forming a microelectromechanical (MEMS) device

A micro-electromechanical (MEMS) actuator and relay are implemented using a copper coil and a magnetic core. The magnetic core includes a base section that lies within the copper coil, and a cantilever section that lies outside of the copper coil. The presence of a magnetic field in the coil causes the cantilever section to move horizontally away from a rest position, while the absence of the magnetic field allows the cantilever section to return to the rest position.

MEMS actuator and relay with horizontal actuation

A micro-electromechanical (MEMS) actuator and relay are implemented using a copper coil and a magnetic core. The magnetic core includes a base section that lies within the copper coil, and a cantilever section that lies outside of the copper coil. The presence of a magnetic field in the coil causes the cantilever section to move vertically away from a rest position, while the absence of the magnetic field allows the cantilever section to return to the rest position.

MEMS actuator and relay with vertical actuation

A method of forming an optical switch is disclosed. The optical switch is implemented with one or more cantilevered optical channels, which are formed in a flexible waveguide structure, and an actuator which is connected to the cantilevered optical channels, to position the cantilevered optical channels to direct an optical signal along one of a number of optical pathways.

Method of forming an optical switch

A method of forming an actuator and a relay using a micro-electromechanical (MEMS)-based process is disclosed. The method first forms the lower sections of a square copper coil, and then forms a magnetic core member. The magnetic core member, which lies directly over the lower coil sections, is electrically isolated from the lower coil sections. The method next forms the side and upper sections of the coil, followed by the formation of an overlying cantilevered magnetic flexible member. Switch electrodes, which are separated by a switch gap, can be formed on the magnetic core member and the magnetic flexible member, and closed and opened in response to the electromagnetic field that arises in response to a current in the coil.

Method of forming a MEMS actuator and relay with vertical actuation

An optical switch is implemented with one or more cantilevered optical channels, which are formed in a flexible waveguide structure, and an actuator which is connected to the cantilevered optical channels, to position the cantilevered optical channels to direct an optical signal along one of a number of optical pathways.

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Santa Clara, CA, United States of America

Trevor Niblock