International Business Machines Corporation

Trevor A Thompson

Jeffrey P Gambino

Zhong-Xiang He

Fen Chen

Eric Jeffrey White

Approaches for fabricating copper wires in integrated circuits are provided. A method of manufacturing a semiconductor structure includes forming a wire opening in a mask. The method also includes electroplating a conductive material in the wire opening. The method additionally includes forming a cap layer on the conductive material. The method further includes removing the mask. The method still further includes forming spacers on sides of the conductive material. The method additionally includes forming a dielectric film on surfaces of the cap layer and the sidewall spacers.

Growing community of inventors

Jeffersonville, VT, United States of America

Trevor A Thompson