Seagate Technology Incorporated

Travis William Grodt

Joachim Walter Ahner

David Marcus Tung

Stephen Keith McLaurin

Henry Luis Lott

Daniel J Gargas

Stephen Christopher Kekoa Hager

A system includes a light source, a detector, and a processor. The light source is configured to emit light onto a target. The detector is configured to receive light interaction between the emitted light and the target. The processor is configured to receive the light interaction between the emitted light and the target and further configured to process the light interaction to determine an edge profile associated with the target.

Edge profile detection

Provided herein is an apparatus, including an excitation arm including excitation optics; a collection arm including collection optics, wherein the excitation arm and the collection arm are geometrically off-axis from one another for independent control of the excitation optics or the collection optics; and a full-surface spectroscopic analyzer to analyze a thin-film over an article from Raman-scattered light collected by the collection optics.

Raman apparatus and methods

Provided herein is an apparatus including a photon emitter configured for reflecting photons from a surface of an article onto a first reflective surface. In addition, a second reflective surface is configured for reflecting photons from the surface of the article back onto the surface of the article. The apparatus also includes a detector configured to provide information corresponding to photons scattered from features of the article.

Reflective surfaces for surface features of an article

Provided herein is an apparatus, including a photon emitter configured for emitting photons onto a surface of an article; a first reflective surface and a second reflective surface configured to reflect the photons onto the surface of the article; and a processing means configured for processing signals from a photon detector array corresponding to photons scattered from surface features of the article.

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Fremont, CA, United States of America

Travis William Grodt