Atlantic Inertial Systems, Inc.

Bae Systems, Inc.

Tracey Hawke

Ian Michael Sturland

Christopher Paul Fell

Rebecka Eley

Mark Venables

A method for forming a MEMS structure for an inertial sensor from fused silica includes: depositing a conductive layer on one or more selected regions of a first surface of a fused silica substrate, and illuminating areas of the fused silica substrate with laser radiation in a pattern defining features of the MEMS structure for an inertial sensor. A masking layer is deposited at least on the one or more selected regions of the first surface of the fused silica substrate where the conductive layer has been deposited, such that the illuminated areas of the fused silica substrate remain exposed. A first etch of the exposed areas of the fused silica substrate is performed so as to selectively etch the pattern defining features of the MEMS structure for an inertial sensor.

Fabrication of MEMS structures from fused silica for inertial sensors

A method of reactive ion etching a substrateto form at least a first and a second etched feature () is disclosed. The first etched feature () has a greater aspect ratio (depth:width) than the second etched feature (). In a first etching stage the substrate () is etched so as to etch only said first feature () to a predetermined depth. Thereafter in a second etching stage, the substrate () is etched so as to etch both said first and said second features () to a respective depth. A mask () may be applied to define apertures corresponding in shape to the features (). The region of the substrate () in which the second etched feature () is to be produced is selectively masked with a second maskant () during the first etching stage, The second maskant () is then removed prior to the second etching stage.

Reactive ion etching

Improved thin film getter devices () comprise a layer () of getter material deposited on a substrate (). The layer has a main portion () and a cap portion (), which forms an external surface of the device. The cap portion has a lower specific area than the main portion.

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Bristol, United Kingdom

Tracey Hawke