Smc Corporation

Toyonobu Sakurai

Ikuo Kanzaka

Akira Enzaki

Mamoru Fukuda

Masao Kajitani

Hiroaki Suzuki

Tetsuro Tokuda

The high vacuum valve includes a valve housing having a valve flow channel provided in an interior thereof, two ports connected to the valve housing so as to be arranged perpendicular relative to each other, and capable of being communicated with each other through the valve flow channel, a valve member housed in the valve flow channel for opening and closing the valve flow channel, a valve shaft received in the valve flow channel for causing the valve member to perform opening/closing operations, and an assembly comprising a tubular member and a welded bellows and hermetically surrounding a periphery of the valve shaft, the assembly being fixed at one end portion thereof to a rear face of the valve member and fixed at the other end portion thereof to a portion of the interior of the valve housing which is opposed to the rear face of the valve member.

High vacuum valve

The two-port valve comprises a main valve part which includes a valve seat disposed in the flow path, a valve element for opening and closing the flow path, and a rod coupled with the valve element and inserted into a through hole of a bonnet, and an operation part for driving the rod. The protection structure is provided in the two-port valve for protecting the rod seal member for the through hole from the fluid containing a depositional material. The protection structure includes ring-shaped abutting seal surfaces disposed in a wide area between a peripheral part of the valve element and an outer periphery of the rod for preventing the invasion of the fluid in a state of opening the valve. A ring-shaped elastic seal member is disposed on an inner end of the abutting seal surface.

Protection structure for rod seal member of two-port valve

A vacuum regulating valve has a poppet type valve element supported so as to be brought into uniformly close contact with a valve seat disposed in a passage connecting two main ports. The valve element is connected to a valve stem by a connecting mechanism that allows the valve element to tilt relative to the valve stem. A piston included in a cylinder actuator moves the valve stem axially.

Vacuum regulating valve

An evacuating valve includes a chamber port structure to be connected to a vacuum vessel in which a plasma is produce to create a plasma atmosphere, a pump port structure to be connected to a vacuum pump; a valve casing defining a passage connecting the chamber port structure and the pump port structure, and a valve mechanism for opening and closing the chamber port structure. At least two expended parts are formed by expanding an end part of the inside surface of the chamber port structure, and the valve element has a large part capable of being pressed against the valve seat with the sealing member held between the large part and the valve seat, and at least two small parts capable of being fitted in the expanded parts of the chamber port structure.

Evacuating valve

A poppet valve seal mechanism has a groove to which a seal member is mounted such that a width of an opening of the groove is smaller than a maximum width inside of the groove and a cross section area of the groove is smaller than that of the seal member. A maximum width of a portion of the seal member accommodated in the groove is greater than a width of the opening of the groove. A width of the opening is constant over its entire peripheral. An inner wall forming the inside of the groove is formed with communication holes and which bring the inside of the groove and the outside of the groove into communication with each other.

Poppet valve seal mechanism

To provide a maintenance-easy two-port valve capable of easily assembling and disassembling a valve body and a bonnet, and preventing the bonnet from being detached from the valve body by an erroneous operation. In a two-port valve having attachment means for detachably attaching a bonnet to a valve body the attachment means includes a plurality of shafts fixedly attached to a valve body and each having an engagement groove on an upper end portion, a handle a plate rotatably provided between an upper end portion of the bonnet and the handle and having an engagement groove engaged to or disengaged from the retaining groove by rotating the plate and an engagement pin engaged with an engagement hole provided in the plate at a push-down position of the handle transmitting the rotation of the handle to the plate and fixedly attached to the handle

Maintenance-easy two-port valve

To constitute a poppet valve with a heater by providing a heater which heats a valve member at a fixed position inside valve casing without attaching the heater to the valve member, a rod or the like which is a movable member as necessary. In a valve casing having main ports , a flow path which connects these main ports , a valve seat which is provided inside the flow path , a valve member which opens/closes the valve seat , and a rod which is coupled to the valve member , a cylindrical heat transfer body is disposed at a fixed position therein so as to surround the rod , and the heat transfer body is caused to house a first heater therein, so that a poppet valve is constituted such that the valve member comes in contact with the heat transfer body at a time of opening of the valve member

Poppet valve with heater

A heater and a temperature sensor are mounted to a valve member driven for opening and closing through a piston and a rod, primary conductors extending from the heater and the temperature sensor are connected to a terminal block mounted to the piston, a secondary conductor having a spiral portion for expansion and contraction is connected between the terminal block and a connector mounted to a lid body, and displacements of the primary conductors due to opening and closing of the valve member are absorbed by expansion and contraction of the spiral portion.

Vacuum valve with heater

There is provided a two-port valve in which a deviation of a degree of parallelization of a valve member and a valve seat can be corrected automatically, which has excellent airtightness, and in which assembly and replacement of the valve member are easy. For this purpose, a shoulder portion and a small-diameter portion are formed in a vicinity of an end portion of a shaft , a groove portion into which a snap ring is mounted is formed in a vicinity of a tip end portion of the small-diameter portion, a through hole into which the small-diameter portion is inserted and an annular stepped portion formed by increasing a diameter of a portion of the through hole are provided to the valve member , a sealant for providing sealing between the shaft and the valve member is mounted to the stepped portion, a plate is provided between the valve member and the snap ring , and the valve member is locked while pressing the sealant mounted to the stepped portion and while being pushed against the shoulder portion by the snap ring mounted into the groove portion and the plate

Two-port valve

The piezoelectric element laminate which expands due to application of a voltage is disposed between a diaphragm valve applied with elastic force in a valve opening direction and a valve spring mechanism , a distortion amount a of the piezoelectric element laminate in expansion is set to be larger than an opening/closing stroke b of the diaphragm valve , and a spring seat separates from a second stopper due to a difference c between the distortion amount a and the opening/closing stroke b. As a result, when the piezoelectric element laminate expands to seat the diaphragm valve on a valve seat , the valve spring is compressed and repulsing force of the valve spring acts on the diaphragm valve through the piezoelectric element laminate and the diaphragm valve is pressed against the valve seat by the repulsing force.

Growing community of inventors

Tsukuba-gun, Japan

Toyonobu Sakurai