Matsushita Electric Industrial Co., Ltd.

Toyoki Takemoto

Haruyasu Yamada

Tsutomu Fujita

Hiroyuki Sakai

Tadao Komeda

Michihiro Inoue

Kenji Kawakita

Noboru Nomura

Toshiki Mori

Akira Matsuzawa

Jun Shibata

Takeji Kimura

Masaharu Sato

Yuichi Hirofuji

Hiroshi Kuroda

Atsuko Akiyama

In an integrated circuit comprising an IIL and a high frequency npn bipolar transistor which has a deep p.sup.- -type base region 45 for its inverted npn output transistors, circuit elements such as a resistor part R, a capacitor part C, a diode part D and an isolated crossing connection part Cr are provided with deep p.sup.- -type regions 54, 54', 65', 71 and 82 which are formed at the same time with the p.sup.- -type region 45 in the IIL, and thereby, reliability of the circuit elements as well as characteristic thereof are improved, thereby further improving manufacturing yields.

Semiconductor integrated circuit

In a semiconductor IC, a vertical pnp or npn transistor of a uniform characteristic and a high breakdown voltage is made by forming, for example, a p.sup.- -collector region (39) in an n-type epitaxial region, an n-well base region (41) formed in the p.sup.- -collector region (39) and a p-emitter region (42) formed in the n-well base region (41); and furthermore, for example as shown in FIG. 9, p.sup.- -regions (40) and (49) are formed simultaneously with the p.sup.- -collector region (39) and an n-region (53) is formed simultaneously with the n-well base region (41), thereby constituting IIL of superior characteristics and a high resistance device at the same time as forming of the vertical transistor without substantial increase of manufacturing steps; and in the similar way, by combining the p.sup.- -region and n-region formed in the above-mentioned simultaneous steps with other region formed simultaneously with the forming of the vertical transistor, high h.sub.FE transistor, high speed vertical npn transistor, cross-over devices, p-channel and/or n-channel MOS transistors can be formed within limited manufacturing steps.

Method of making semiconductor IC including polar transistors

Method of making bipolar transistors

A method of manufacturing a semiconductor integrated circuit device of the bipolar type of the MOS type or an integration of the two types having high integration and high performance, in which the circuit includes a first device region of which the side surface and entire region of the lower portion of the active region are made of silicon oxide and a second device region of which the side surface and a part of the lower portion of the active region are made of silicon oxide. According to the present invention, a transistor whose bottom portion is opened and a transistor whose bottom portion is not opened can be freely provided on a substrate, thereby dividing the transistors into a transistor to which a voltage can be supplied from the substrate and a transistor to which the voltage can not be supplied from the substrate, so that the wiring which has been conventionally needed can be reduced. In addition, in such transistors which are completely separated, the parasitic effect with the circumference is completely prevented so that excellent characteristics can be provided.

Method of manufacturing a semiconductor integrated circuit device

Disclosed is a method of isolating a transistor perfectly by employing a selective oxidation technology (LOCOS technology). More particularly, vertical openings are formed in the surface of {100} silicon substrate, and oxidation resistant films are formed of this surface and in part of the side walls of these openings. In succession, by etching with an etchant having an orientation anisotropy, dents are formed at high precision in the side walls of the openings. By oxidizing using the oxidation resistant film as the mask, an oxide film growing out from a dent in the opening side wall is connected with another oxide film growing out from an adjacent dent. The transistor thus formed in the active region of the silicon electrically isolated from the substrate is small in parasitic capacitance and may be formed into a small size, so that it possesses the features suited to VLSI, that is, high speed, low power consumption, and processability to high density integration.

Method of manufacturing isolated semiconductor devices

Semiconductor device, such as bipolar transistor, is made by molecular beam epitaxy, wherein a emitter layer (27) and overriding contact regions (28) of polycrystalline silicon are grown continuously on a silicon substrate (23+26) without breaking high vacuum, thus eliminating the adverse interface of natural oxide film under the polycrystalline silicon layer (28) and the adverse donor-acceptor compensation while attaining a well controlled h.sub.FE and enabling a shallow emitter junction.

Method for making semiconductor device utilizing molecular beam epitaxy

The invention provides a method for manufacturing a semiconductor device, wherein a semiconductor substrate is vertically etched to form a groove, antioxidant insulating films are formed on the side walls of the groove, and local oxidation is performed. Lateral extrusion of an oxide film which is a so-called bird's beak and a projection of the oxide film which is a so-called bird's head are substantially eliminated. As a result, the active region of the transistor, that is, the element formation region may not be narrowed, providing high packing density and high precision. Furthermore, the surface of the semiconductor substrate is flattened to prevent short-circuiting and disconnections of wiring layers. Stable manufacturing process provides a high yield of the semiconductor device. Electrical characteristics of the semiconductor device are greatly improved.

Method for manufacturing a semiconductor device

A parallel type analog-digital converter having a plural number (1023) of comparators, a first voltage divider comprising a plural number (1023) of resistors (R.sub.1 to R.sub.1023) connected in series across positive and negative terminals of a power source thereby feeding reference voltages from the junction points to the comparators, the apparatus further comprises

Analog-digital converter with linear characteristic restoration circuit

A semiconductor integrated circuit device in which the side surfaces of an emitter of an oxide isolated bipolar transistor are surrounded with insulating compounds or regions so that the capacitance between the emitter and base is lowered and a base is formed by the self-alignment so that the influence of an active base between an external base and the emitter can be made negligible. Thus the base resistance and parasitic capacitance are lowered.

Oxide walled emitter

In a stacked, multilayer IIL (integrated injection logic) circuit, with which power consumption can be significantly reduced, a discharging circuit constructed of an IIL constant-current circuit or of a resistor is provided for one of transistors which are used for shifting the level of a signal from an IIL circuit of a top layer to an IIL circuit of a bottom layer, so that signal transmission therebetween is prevented from deterioration. A charging circuit may be added to another transistor, while a diode may be interposed between these transistors. Additional diodes may be interposed between adjacent layers for speeding up the signal transmission from one layer to another upper layer.

Semiconductor integrated circuit having stacked integrated injection

A first logic circuit comprises coupling gate circuits driven by clock pulses of different phases, flip-flop circuits cascade-connected via the coupling gate circuits and feedback circuits for feeding back the outputs of the flip-flop circuits to the preceding stage flip-flop circuits, and generates pulse sequences of different phases. A second logic circuit further comprises latch circuits one for each of the flip-flop circuits, driven by the pulse sequences generated by the first logic circuit. Those logic circuits are useful to a successive approximation register of a successive approximation A/D converter.

Shift register circuit

A parallel type A/D converter capable of operating at an extremely high speed with a high degree of accuracy and with low power consumption. A plurality of comparators each having a reference voltage corresponding to an assigned quantizing level are disposed in parallel with each other and divided into a plurality of comparator blocks or groups. A plurality of sub-comparators are provided so that prior to the comparison of the input signal by the comparators, the input signal is first compared with the reference voltages of the sub-comparators and in response to the output from the sub-comparator having the reference voltage comparable or corresponding to the incoming input signal, only the comparators in the comparator block or group associated with said sub-comparator are energized or enabled while the remaining comparators are kept de-energized or disabled, whereby a minimum power consumption may be attained.

Fully parallel threshold type analog-to-digital converter

An IC device comprising a junction type field effect transistor of a back gate type and a bipolar device such as a bipolar transistor and a resistor made of impurity diffused region, wherein an extremely thin (in the order of 0.05-0.2 .mu.m) impurity doped surface region of a conductivity type same as that of a back gate region is formed at the surface of a surface channel region, and is separated from at least a drain region to sustain high breakdown voltage between gate region and the drain region; the impurity surface region serving to reduce noise and also enabling to achieve satisfactory characteristics of J-FET and also good ohmic characteristics of the resistor.

Semiconductor integrated circuit device

The present invention is an electronic musical instrument the type in which information of the actuation of keys is detected by scanning the keys of a keyboard. The electronic musical instrument includes keys selectively actuable for producing sounds which correspond to respective musical scale notes, circuitry for sequentially scanning these keys for detection of the information of the actuation of these keys, and a memory circuit corresponding to each of the keys so that the information of the actuation of the keys is stored in the memory circuits.

Electronic musical instrument

In a method of making integrated circuits, prior to vapor deposition of metal layers on an insulating layer for interconnection, each opening on the insulating layer is filled with an embedded metal layer in order to smoothen the surface to be vapor deposited and to avoid undesirable thin parts of the vapor deposited metal layer at the step between the lower part in the opening and the elevated part on the insulating layer. The filling of the embedded metal layer in each opening is made by a first step of coating a metal layer on the whole surface of the principal face of the semi-conductor, which surface is coated by the insulating layer with specified openings and further by a photoresist layer which has been used for etching the insulating layer to form said openings and is left covering said insulating layer, and by the subsequent step of applying a photoresist removing liquid on the face to remove the photoresist layer and the part of metal layer still remaining on the photoresist layer.

Growing community of inventors

Yawata, Japan

Toyoki Takemoto