Ulvac, Inc.

Toyoaki Nakajima

Ryota Tanaka

Tsutomu Yuri

Takeshi Miyashita

Hideki Yoshizawa

Yujirou Kurokawa

Masahiro Fukuhara

Takanobu Sato

Yuujirou Kurokawa

Yasushi Nagata

Yasufumi Uchida

Shuji Yoshida

Jiro Endo

Hitomi Obise

Pressure measurement system has inside a main body to be mounted on an object to be measured: a sensor section; a control section processing an input from the sensor section and outputting a predetermined signal; a vacuum gauge provided with power supply circuit sections for providing the control section and the sensor section with power; and a terminal device being connectable to the control section, through a communication line, in a manner to be freely communicated with each other and being capable of supplying the power circuit section with power. The vacuum gauge is arranged to be able to judge the power supply from the terminal device to the control section. When power is supplied from the terminal device to the control section, the control section and the terminal device are connected together through the communication line so as to be freely communicated with each other.

Pressure measurement system for judging power supply from terminal device to control section

A quadrupole mass spectrometer for use in analyzing gas components in a test piece is made in a constitution in which resistance heating of a grid is materialized, and in which a high-accuracy analysis of the gas components is possible at a low cost while preventing the sensitivity from lowering. A quadrupole mass spectrometer is provided with a sensor section which can be detachably fitted to the test piece. Supposing that the direction of fitting the sensor section to the test piece is in an upward direction, the sensor section is provided with: a predetermined shape of supporting body which is provided at a lower end of the sensor section; an ion source which is provided on the supporting body and which has a filament and a grid for ionizing the gas; a quadrupole section which is provided on the ion source and in which four columnar electrodes are disposed at a predetermined circumferential distance from one another; and an ion detection section which is disposed on the quadrupole section and which collects predetermined ions that have passed through the quadrupole section by applying DC and AC voltages between opposite electrodes.

Quadrupole mass spectrometer

An oxygen detection method, includes: preparing a grid, an ion collector, and a filament in which an oxide are formed on a surface of metal; controlling a filament current flowing to the filament so that an emission current becomes constant; discharging thermionic electrons which are caused by heat generation by applying the filament current, and generating ions by ionizing a gas; capturing the ions with the ion collector; and detecting oxygen being present in a vacuum processing chamber by measuring a filament current value.

Oxygen detection method, air leakage determination method, gas component detection device, and vacuum processing apparatus

A mass spectrometry unit of the present invention includes a mass spectrometry portion that detects ion current values of a gas to be measured according to mass-to-charge ratio, to thereby measure partial pressures of the gas to be measured. The mass spectrometry unit further includes: a control portion for preliminary storing a record of a mass-to-charge ratio of a specific gas that decreases a function of a specific portion of the mass spectrometry unit, in which if an ion current value with the mass-to-charge ratio of the specific gas detected by the mass spectrometry portion is not less than a predetermined value, the control portion outputs a warning signal denoting a functional decrease in the specific portion.

Mass spectrometry unit

A method of controlling a mass spectrometer comprises the steps of: supplying a current to a cathode electrode of an ion source having the cathode electrode and an anode electrode, and ionizing a molecules of a gas to be measured; selecting ions generated in the ion source by mass-to-charge ratio; and detecting an ion current value of the selected ions. When a partial pressure of the gas to be measured is measured based on a detection result of the ion current value, a cathode current is supplied to the cathode electrode such that an emission current flowing between the cathode electrode and the anode electrode becomes constant. When a partial pressure of the gas to be measured is not measured, a constant current having a current value less than that of the cathode current is supplied to the cathode electrode.

Method of controlling mass spectrometer and mass spectrometer

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Chigasaki, Japan

Toyoaki Nakajima