Carl Zeiss Microscopy Gmbh

Carl Zeiss Smt Gmbh

Tooz Technologies Gmbh

Cad Zeiss Ag

Toufic Jabbour

Johannes Winterot

Thomas Milde

Max Funck

Wolfgang Singer

Ralf Wolleschensky

Ingo Kleppe

Guenter Rudolph

Markus Schwab

Johannes Knoblich

Christoph Menke

Christian Wojek

Kai Wicker

Momchil Davidkov

Lars Omlor

Michael Gölles

A method to detect a defect on a lithographic sample includes the following steps: detection light and a detector having at least one sensor pixel are provided. Further, a detection pattern is provided causing a light structure of the detection light being structured at least along one dimension (1D, x). The detection pattern is aligned such that the detector is aligned normal to an extension (xy) of the light structure. Further, a complimentary pattern is provided having a 1D structure which is complimentary to that of the detection pattern. The sample is moved relative to the detection pattern while gathering the detection light on the detector. Further, a reference sample without defects or with negligible defects is provided. The reference sample also is moved relative to the detection pattern while gathering the detection light on the detector. A defect (Sto S) localization on the sample is decoded by correlation using the complementary pattern. Using such defect detection method improves a signal-to-noise ratio.

Method to detect a defect on a lithographic sample and metrology system to perform such a method

Methods and apparatuses for designing optical systems are provided. In this case, on a plurality of known optical systems, machine learning is carried out in order to train a computing device. After this training, the computing device can generate a design for an optical system on the basis of parameters describing desired properties of an optical system.

Methods and apparatuses for designing optical systems using machine learning with delano diagrams

An optical device comprises a light source and a detector, and also a sample holder, which is configured to fix an object in the optical path of light. A scanning optical unit is configured, for a multiplicity of scanning positions, in each case selectively to direct light incident from different angular ranges from the object onto the detector. On the basis of a three-dimensional light field represented by corresponding measurement data of the multiplicity of scanning positions, a spatially resolved imaging of the object is generated, said imaging comprising at least two images from different object planes of the object.

Light field imaging with scanning optical unit

An imaging device includes at least one eyeglass lens to be worn in front of the eye and a display device arranged in the edge region of the eyeglass lens, said display device including an image generator and an imaging optics arranged between the image generator and the eyeglass lens. The image generator is the start point of an imaging beam path which generates the virtual image having an image distance on the basis of the output image and which penetrates into the eyeglass lens by means of the imaging optics via the edge region of the eyeglass lens. An outcoupling device for outcoupling the imaging beam path in the direction of the eye is provided in the eyeglass lens. The display device comprises a device for adjusting the image distance of the virtual image. The invention also relates to data eyeglasses comprising an imaging device.

Imaging device and data eyeglasses

The invention relates to a method for calibrating a digital optical imaging system, comprising at least one motorized or coded zoom system and an image sensor, to a method for correcting aberrations in such an imaging system, and to an optical imaging system which is configured to carry out the methods according to the invention. During the calibration method, a reference object is recorded in various zoom settings and the image is corrected pixel-wise with digital-optical means using a previously determined model. To this end, distortion correction coefficients and image stability correction coefficients are ascertained. The real total magnification of the system is ascertained from the corrected image. The model ascertained in the calibration process also serves for correcting aberrations during operation of the imaging system.

Method for calibrating a digital optical imaging system having a zoom system, method for correcting aberrations in a digital optical imaging system having a zoom system, and digital optical imaging system

The invention relates to a method for calibrating an optical instrument which comprises at least a motorized zoom system, an objective, an image sensor and an image processing unit. The method comprises the following steps: establishing calibration data Dof the zoom system with a reference objective and storing these in an internal memory of the zoom system; establishing calibration data Dof the objective with a reference zoom system and storing these in an internal memory of the objective; reading the internal memories of the zoom system and of the objective and applying a digital-optical correction of an image acquired by an image sensor with the calibration data Dand D. The invention moreover relates to an optical instrument, in particular a digital microscope, to which the calibration method according to the invention can be applied.

Method for calibrating a digital optical instrument and digital optical instrument

Growing community of inventors

Aalen, Germany

Toufic Jabbour