Tokyo Electron Limited

Tosihiko Jo

Keisuke Suzuki

Shingo Hishiya

Eiji Kikama

Hiromi Shima

Kyungseok Ko

Ken Itabashi

Satoru Ogawa

There is provided a vertical heat treatment apparatus for forming a film by supplying a precursor gas to a plurality of substrates that are held in a substantially horizontal posture on a substrate holder with a predetermined interval in a vertical direction. The apparatus includes a processing container including an inner tube accommodating the substrate holder and an outer tube that is disposed outside the inner tube; and a gas nozzle that extends vertically along an inner peripheral surface of the inner tube and has a distal end that penetrates from an inside of the inner tube to an outside of the inner tube. A first gas hole for supplying the precursor gas to the inside of the inner tube and a second gas hole for supplying the precursor gas to the outside of the inner tube are formed on the gas nozzle.

Vertical heat treatment apparatus

Growing community of inventors

Nirasaki, Japan

Tosihiko Jo