Other

Ando Electric Company

Nippon Telegraph and Telephone Corporation

Toshiyuki Yagi

Tadao Nagatsuma

Mitsuru Shinagawa

Katsushi Ohta

Akishige Ito

Junzo Yamada

Hakaru Kyuragi

Noriyuki Toriyama

The present invention relates to an electro-optic probe, which includes the following components: a laser diode for emitting a modulating laser light according to control signals generated in a main body of the electro-optic sampling oscilloscope; a first lens for converting the modulating laser light to a parallel beam; a second lens for focusing the parallel beam; an opto-electronic element having a reflection film at a reflection-end; an isolator device disposed between the first lens and the second lens for transmitting the modulating laser light and separating a reflected beam produced at the reflection film into signal beams; and photo-diodes for converting optical energies of the signal beams separated by the isolator device into respective electrical signals; wherein, the signal beams to enter the photo-diodes are directed to propagate towards the laser diode, and the photo-diodes are disposed in a longitudinal direction of a probe casing.

Electro-optic probe

An electro-optic sampling probe is provided, capable of irradiating a plurality of excitation light beams on a plurality of light receiving portions mounted on an IC wafer which is an object for measurement. The electro-optic sampling probe comprises a plurality of excitation optical system modules which commonly uses an objective lens for condensing the excitation light beams on the IC wafer and a detachable portion for attaching and detaching the excitation optical system module, a second probe body for covering the optical path of a light beam emitted from the excitation optical system module is provided at the rear side of the IC wafer, and at least one of the plurality of excitation optical system modules have an optical axis which differs from those of other modules; thereby at least two excitation light beams can be irradiated on the light receiving portions on the IC wafer surface.

Probe for electro-optic sampling oscilloscope

In order to maintain accuracy of measurement, a temperature-insensitive electro-optic probe has a laser diode provided to emit a laser beam based on a control signal of an oscilloscope body, a collimator lens provided to convert the laser beam into a parallel beam; an electro-optic element having on an end face thereof a reflective coating, with the optical characteristics which are changed by propagating an electrical field via a metal pin provided at the end face on the reflective coating side, an isolator provided between the collimator lens and the electro-optic element, and adapted to transmit the laser beam emitted from the laser diode, in order to separate a light reflected by the reflective coating from the laser beam, a photodiode provided to convert the reflected light separated by the isolator into an electrical signal, a temperature detection section arranged to be in contact with optical components consisting the isolator, and to detect the temperature of the optical components and output the result of the detection, a temperature adjustment section arranged to be in contact with the laser diode, and to adjust the temperature of the laser diode based on the result of the temperature detection, and a temperature control unit provided to control the temperature adjustment section based on the result of the temperature detection.

Temperature-insensitive electro-optic probe

An electro-optic probe is provided which is able to prevent unnecessary reflected light from optical components in the electro-optic probe from entering photodiodes. The optical components which constitutes an isolator are disposed inclining from an optical path of a parallel light emitted from a collimating lens , such that the unnecessary reflected light beams from these optical component surfaces are not incident to the photodiodes and . The inclination angle of these optical components are set within a range from an angle formed by an optical path from said optical component to a light receiving element in said photodiode, and the diameter of said light receiving element to an angle allowable for the optical component to maintain the transmittance thereof.

A probe for an electro-optic sampling oscilloscope is provided, capable of obtaining an improved accuracy in measurement of the test measuring signals by controlling a temperature of an electro-optic element so as to be maintained at a constant such that the refractive index of the electro-optic element does not change due to the temperature change. The probe for the electro-optic sampling oscilloscope comprises a reflecting film at one end and a metal pin provided on the surface of the reflecting film such that the optical property of the electro-optic film changes according to an electric field applied through the metal pin. The probe further comprises a temperature detecting portion, disposed so as to contact with the electro-optic element, for detecting and outputting the temperature of the electro-optic element, a temperature adjusting portion, disposed so as to contact with the electro-optic element facing the temperature detecting portion about the electro-optic element, and a temperature controlling portion for controlling the temperature adjusting portion based on the result of the temperature detection.

An electro-optical probe used for an oscilloscope (e.g., electro-optic sampling oscilloscope) is mainly constructed by a probe head and a probe unit. The probe head contains a metal pin and an electro-optical element having a reflector at its terminal surface. The probe unit contains a reduced number of optical parts, which are arranged such that an optical axis of incoming beams of the electro-optical element differs from a optical axis of outgoing beams of the electro-optical element. That is, laser beams output form a laser diode are subjected to convergence by a converging lens to produce converged beams, which are incident on the electro-optical element as its incoming beams. The incoming beams are subjected to reflection by the reflector to produce reflected beams, which are output from the electro-optical element as its outgoing beams. Then, the reflected beams are converted to parallel beams by a collimator lens, or they are converged by a converging lens. A polarization detector performs separation on input beams from the lens to produce separated components of beams, optical axes of which differ from each other. Those components of beams are respectively supplied to photodiodes, wherein they are converted to electric signals. Thus, it is possible to measure a waveform of a measured signal based on differences between the electric signals, which reflect changes of polarization states of the beams in the electro-optical element.

Electro-optical probe for oscilloscope measuring signal waveform

A probe for an electrooptic sampling oscilloscope in which an electric field generated by a measured field is coupled with an electrooptic crystal. A beam is incident on this electrooptic crystal, and by the polarization state of the incident beam, the form of the measured signal is measured. The electrooptic element is supported form the end terminal side of the probe body by a probe head member that serves as the end terminal of the probe body. An insertion hole is formed from the outside up to the reflecting film on the probe head member. One end thereof is in contact with a reflecting film, the other end thereof is inserted so as to protrude from the probe head member, and at the same time, the external radial diameter of the insertion hole is formed so as to be large compared to the radial dimension of the reflected film.

Electrooptic probe

An electrooptic probe which can facilitate replacement of a metallic pin. A probe head constituting a tip end portion of a probe body including a head body for retaining an electrooptic element and a tip member detachably provided on the head body for retaining the metallic pin.

An electro-optic probe having a laser diode for generating a laser beam based on a control signal from an oscilloscope body; a collimator lens for making the laser beam into a parallel beam; an electro-optic element having on an end face thereof a reflective coating, with optical characteristics which are changed by propagating an electrical field via a metal pin provided at the end face on the reflective coating side; an isolator provided between the collimator lens and the electro-optic element, which passes a laser beam generated by the laser diode and isolates a reflected beam which is reflected by the reflective coating; and photodiodes which convert the reflected beam isolated by the isolator into electrical signals. The electro-optic element is integrally affixed to a probe head which is rotatable with respect to a probe body on which the probe head is mounted.

The present invention relates to an electrooptic probe that couples an electrical field generated by a measured signal and an electrooptic crystal, makes light incident on this electrooptic crystal, and measures the waveform of the measured signal by the state of the polarization of the incident light. Here, in the probe body,, the probe head,and the supporting member,positioned between the end terminal,and the part that encloses the laser diode,and the photodiodes,and,are formed by an insulating body (polyacetal resin). Furthermore, the photodiodes,and,and the laser diode,are covered by electromagnetic shield members,and,that are separated from each other.

An electro-optic probe is provided which is capable of maintaining the contact pressure of the metal pin on the test object at a constant and capable of protecting the safety of the electro-optic element during measurement. The electro-optic probe has a probe head which is attached to the probe body such that a relative position of the probe head in the direction of the optical path can be elastically regulated by a spring disposed between the probe head and the probe body.

The present invention relates to a probe for an electro-optic sampling oscillator. The probe for an electro-optic sampling oscillator provides a laser diode that generates a laser beam based on the control signal of the electro-optical sampling oscilloscope; a collimator lens that makes the laser beam into a parallel beam; an electro-optic element that has a reflecting film at the end; an isolator provided between the collimator lens and the electro-optic element that passes the laser beam that is generated by the laser diode and separates the reflected beam of the laser beam that was reflected by the reflecting film; photodiodes that convert the reflected beam separated by the isolator into an electrical signal; and a condenser lens provided between the isolator and the electro-optic element that condenses the parallel beam to one point on the reflecting film, makes the reflected beam reflected by the reflecting film into a parallel beam again, and makes the optical axes of the light incident on the reflecting film and the light reflected by the reflecting film coincide.

Growing community of inventors

Tokyo, Japan

Toshiyuki Yagi