Honda Motor Co., Ltd.

Toshiyuki Shima

Masahiro Ohta

Toshio Tokune

Toshiyuki Ohashi

Ryogo Kato

Provided is a substrate for carbon nanotube growth in which no metal particles as a catalyst aggregates and a method for manufacturing the substrate. A substrate for carbon nanotube growthincludes a base plate, a catalyst, a form-defining material layerwhich allows the catalystto be dispersed and arranged, and a covering layerwhich has a metal oxide to cover the catalyst. A method for manufacturing a substrate for carbon nanotube growthincludes a step of sputtering on a base platea metal which forms a catalystand oxidizing the surface of the metal, a step of sputtering a form-defining material on the base plate, and a step of further sputtering on the form-defining material a metal which forms a catalystand oxidizing the surface of the metal.

Substrate for carbon nanotube growth and method for manufacturing the same

Provided is a substrate for carbon nanotube growth in which no metal particles as a catalyst aggregates and a method for manufacturing the substrate. A substrate for carbon nanotube growthincludes a base plate, a noble metal alloy catalysthaving an alloy of a noble metal and a transition metal, and a form-defining material layerwhich allows the noble metal alloy catalystto be dispersed and arranged. A method for manufacturing a substrate for carbon nanotube growthincludes a step of sputtering a noble metal alloy on a base plate, a step of sputtering a form-defining material on the base plate, and a step of further sputtering the noble metal alloy on the form-defining material.

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Tagajo, Japan

Toshiyuki Shima