Sumitomo Heavy Industries, Ltd.

Other

Toshiyuki Sakemi

Masaru Tanaka

Etsuo Ogino

Tetsuya Yamamoto

Hiroyuki Makino

Morio Maeda

Shunji Wada

Masatomi Inokuma

Hisashi Kitami

Kiyoshi Awai

Provided is a negative ion irradiation device in which an object is irradiated with a negative ion. The device includes a chamber that allows the negative ion to be generated therein, a gas supply unit that supplies a gas which is a raw material for the negative ion, a plasma generating portion that generates plasma, a voltage applying unit that applies a voltage to the object, a control unit that performs control of the gas supply unit, the plasma generating portion, and the voltage applying unit. The control unit controls the gas supply unit to supply the gas into the chamber, controls the plasma generating portion to generate the plasma in the chamber and to generate the negative ion by stopping the generation of the plasma, and controls the voltage applying unit to start voltage application during plasma generation and to continue voltage application after plasma generation stop.

Negative ion irradiation device

A correction mechanism including a magnetic body ( ) is placed at a position between a vacuum chamber ( ) and a steering coil ( ) and where line of magnetic force generated from the steering coil is present, to correct torsion and/or bias of a plasma beam.

Vacuum film growth apparatus

An auxiliary anode (,) having a ring-shaped permanent magnet (,) is placed in a vacuum chamber (,) such that the auxiliary anode is coaxial with a central axis of a hearth (,) and is positioned so as to surround an upper area of the hearth. A plasma beam generated by a plasma beam generator (,) using arc discharge is guided into the hearth. Magnesium (Mg) is used as a vaporization material on the hearth. Gas mixed with oxygen is supplied into the vacuum chamber. As a result, magnesium oxide particles sublimated from the hearth react with oxygen plasma generated by the plasma to form a magnesium oxide (MgO) film on a substrate (,).

Film growth method and film growth apparatus capable of forming magnesium oxide film with increased film growth speed

A film deposition apparatus to which the present invention is applied comprises a vacuum chamber,, a plasma beam generator,, a main hearth,which is disposed within the vacuum chamber and which serves as an anode containing a vaporizable material Cu, and an auxiliary anode,surrounding the main hearth, the auxiliary anode being formed of an annular permanent magnet,and a coil,. A Cu film is formed on a substrate,placed opposite to the main hearth.

Film deposition method for forming copper film

Ion plating apparatus

A plasma beam is directed towards a hearth to flow electric current of the plasma through the hearth during formation of a thin film on a substrate. The plasma beam is directed towards an auxiliary anode to flow electric current of the plasma through the auxiliary anode during the period after completion of the formation of the thin film on the substrate and before beginning of the formation of a thin film on the subsequent substrate.

Ion plating apparatus that prevents wasteful consumption of evaporation

A plasma processing apparatus comprises a vacuum chamber, a plasma beam generator arranged in the vacuum chamber, and a main hearth located in the vacuum chamber and is for carrying out a step of a plasma beam produced by the plasma beam generator to the main hearth. The plasma processing apparatus further comprises a permanent magnet and a hearth coil arranged in the vicinity of the main hearth to be concentric with a center axis of the main hearth to be concentric with a center axis of the main hearth. The meltability of a material and the flight distribution of the vapor particles derived from a vaporizable material are adjusted by varying an electric current supplied to the hearth coil.

Plasma processing method and plasma processing apparatus

In an electromagnetic induction heater for use in heating a strip by electromagnetic induction between a pair of magnetic-pole elements, a plurality of guide rollers are arranged between the magnetic-pole elements to guide the strip. The strip may be guided on the guide rollers in a staggered manner. Each guide roller may comprise a roll element of a ferromagnetic material. Each end surface of the magnetic-pole elements may be concave so that each end surface surrounds each guide roller with a gap left therebetween.

Growing community of inventors

Niihama, Japan

Toshiyuki Sakemi