Tokyo Seimitsu Co., Ltd.

Hochiki Corporation

Toshiyuki Ozawa

Masao Shibata

Shigeharu Arisa

A wafer grinding method and a wafer grinding machine are disclosed for grinding a wafer by executing both the rough grinding process and the finish grinding process. After the rough grinding process before the finish grinding process, the wafer thickness is measured with a noncontact-type thickness gauge, and during the finish grinding process, the finish thickness is finely adjusted by use of a contact-type thickness gauge and referring to the measurement data of the noncontact-type thickness gauge.

Wafer grinding method and wafer grinding machine

A fire sensor according to the present invention includes a sensor base, a sensor body and an address unit. The sensor base is mounted and fixed on a predetermined position, for example, a ceiling. The sensor body includes a plurality of pins for electrically connecting the sensor body with the sensor base, and a first fitting member for electrically and mechanically connecting the sensor body with the sensor base. The plurality of pins are formed on a surface of the sensor body connectable to the sensor base and circumferentially arranged on a circle with a predetermined radius. The sensor base has a second fitting member which is electrically and mechanically fitted to the first fitting member. The address unit is mounted on the sensor base, and includes a nonvolatile memory for electrically setting a readable address of the fire sensor, a first slide groove formed along a path of rotation movement of the plurality of pins, and a plurality of connector members formed along the first slide groove, each of the pins passing through the connector members and electrically connecting to each of the connector corresponding thereto. The plurality of pins are inserted in substantially perpendicular into the first slide groove, and then the sensor body is rotated to fit the pins to the connector members, respectively, and the first fitting member to the second member.

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Tokyo, Japan

Toshiyuki Ozawa