Hitachi-high-technologies Corporation

Toshiyuki Oyagi

Takeshi Sato

Isao Nagaoki

Yasuhira Nagakubo

Kiyotaka Nakano

Hiroaki Matsumoto

Takafumi Yotsuji

An electron microscope includes a secondary electron detector () which detects an electron generated when a sample () is illuminated with an electron beam from an electron gun (), a monitor () which displays a secondary electron image of the sample based on an output of the detector, a gas inlet device () which emits gas to the sample, and a gas control device () which controls a gas emitting amount of the gas inlet device so that a degree of vacuum in an intermediate chamber () in which the secondary electron detector is installed may be kept at less than a set value P1 during gas emission performed by the gas inlet device. Accordingly, a microscopic image of the sample in a gas atmosphere with use of the detector requiring application of voltage is obtained.

Electron microscope and sample observation method

Provided is an electron microscope wherein a detector requiring the application of a voltage is used to obtain a micrograph from a sample placed in a gas atmosphere. The electron microscope is provided with a gas inlet device for emitting gas onto a sample, and a gas control device controlling the amount of gas emitted by the gas inlet device so that, during the gas emission by the gas inlet device, the degree of vacuum within the space where the detector (-) is installed is continuously maintained to less than a set value.

Electron microscope

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Tokyo, Japan

Toshiyuki Oyagi