Kabushiki Kaisha Yaskawa Denki

Toshiyuki Osuga

Toshihiro Sawa

Takehiko Komiya

To be able to restrain a height of a machine even when the machine is large-sized and smoothly move a table in XY&#x3b8; directions. An alignment apparatus includes two translational freedom degree guide portion (), one rotational freedom degree guide portion (), a translational drive/translational/rotational freedom degree mechanism module () including a linear motor provided at one of the translational freedom degree guide portion (), a machine base portion (), a reference generator portion (), a two-dimensional position sensor (), a calculating portion of compensation value (). At least three of the translational drive/translational/rotational freedom degree mechanism modules () are uniformly arranged to a table ().

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Kitakyushu, Japan

Toshiyuki Osuga