Hitachi, Ltd.

Toshiyuki Ohashi

Kazuo Shii

Hiroyuki Kobayashi

Shigeto Isakozawa

Mikio Ichihashi

Yuji Sato

Toshiro Kubo

Takashi Yokoto

An electron lens comprising a first exciting coil, a second exciting coil, a casing for encompassing the first and second exciting coils, and an excitation control apparatus for controlling the excitation state of at least the first exciting coil independently of the second exciting coil. The excitation control apparatus independently controls currents applied to the first and second exciting coils, respectively. At this time, exothermy of each coil can be kept constant and thermal deformation of the casing can be prevented by keeping the sum of the absolute values of the currents applied to the coils.

Electron lens

Transmission type electron microscope

Provided is an electron microscope having an electron gun emitting an electron beam onto a specimen to be observed, so as to produce transmitted main electron rays, inelastic scattering electron rays and diffractive scattering rays, an objective lens converging the electron rays so as to form an image, an objective aperture for normally cutting off the diffractive scattering electron rays while allowing the transmitted main electron rays and the inelastic scattering electron rays to pass therethrough, a magnifying means for magnifying the image, an observing screen from which the magnified image is visible, a mechanism for deflecting the electron beam emitted from the electron gun before the specimen, and a means for controlling the mechanism to deflect the electron beam to a large deflecting angle so as to cut off the main transmitted electron rays and the inelastic scattering electron rays at the objective aperture while allowing the diffractive scattering electron rays to enter into the magnifying lens through the objective aperture so as to form a dark field image having high contrast, whereby the focusing is made while observing the dark field image.

Transmission electron microscope

An electron microscope with a television observation apparatus is equipped such that an observation image of the electron microscope on a television fluorescent screen and an image displayed on a cathode-ray tube through taking-in of the electron microscope observation image by a television camera are conformed to each other in up/down and right/left directions and composition. This can be realized by making the polarity of a deflection electrode of the television camera or a deflection electrode of the cathode-ray tube in a horizontal scanning direction reverse to a usual polarity, or by interposing an odd number of reflectors between the television fluorescent screen and the television camera.

Electron microscope with television observation apparatus

An electron microscope provided with a wobbler device forms a magnified image of a specimen on a fluorescent panel therein. This magnified image is displayed on a monitor by means of a television camera. The microscope is provided with a synchronizer for allowing the wobbler device to change deflection angles of a beam of electrons in synchronism with a synchronizing signal for the monitor.

Electron microscope

An electron microscope is disclosed in which an electron beam impinges upon a specimen at a predetermined angle of incidence, the incident azimuth of the electron beam incident upon the specimen is continuously changed, and the electron beam having passed through the specimen is made large in angular spread by a magnifying lens system and then projected onto a viewing screen to form a visual enlarged image of the specimen on the viewing screen; and in which the astigmatism of the magnifying lens system is shown on the viewing screen as the blur of the image.

Growing community of inventors

Katsuta, Japan

Toshiyuki Ohashi